[1] Zheng Yunqiang, Liu Huan, Meng Jiacheng, . Development status, trend and key technologies of air-based laser communication[J]. Infrared and Laser Engineering, 51, 20210475(2022).

[2] Li Rui, Lin Baojun, Liu Yingchun, . Review on laser intersatellite link: Current status, trends, and prospects[J]. Infrared and Laser Engineering, 52, 20220393(2023).

[3] [3] Chen Fei. Study on high power Nd: YAG laser scanning galvanometer system[D]. Wuhan: Huazhong University of Science & Technology, 2011. (in Chinese)

[4] [4] Mincuzzi G, Rebiere A, Lopez J, et al. New, fast, galvo scanner head f high throughput micromachining [C]Proceedings of SPIE, 2018, 10520: 105200X.

[5] [5] Mincuzzi G, Rebiere A, Goaec B, et al. Beam engineering f high throughput material processing with high power, femtosecond lasers [C]Proceedings of SPIE, 2019, 10906: 109061B.

[6] Mincuzzi G, Audouard E, Bourtereau A, et al. Pulse to pulse control for highly precise and efficient micromachining with femtosecond lasers[J]. Optics Express, 28, 17209-17218(2020).

[7] Fan Nana, Wang Mao, Wen Shaocong, . Optical design for 2D MEMS-based lidar system[J]. Optical Technique, 46, 290-294(2020).

[8] Xu Shouzhen, Xie Shimeng, Wu Dan, . Ultrasound/photoacoustic dual-modality imaging based on acoustic scanning galvanometer[J]. Acta Phys Sin, 71, 050701(2022).

[9] [9] Lu Yafei. Research on fastfine steering mirr system [D]. Changsha: National University of Defense Technology, 2009: 2130. (in Chinese)

[10] [10] Wu Xin. Research on highperfmance fast steering mirr [D]. Wuhan: Huazhong University of Science Technology, 2012: 119. (in Chinese)

[11] [11] Loney G C. Design perfmance of a small twoaxis highbwidth steering mirr [C]Proceedings of SPIE, 1991, 1454: 198206.

[12] Kluk D J, Boulet M T, Trumper D L. A high-bandwidth, high-precision, two-axis steering mirror with moving iron actuator[J]. Mechatronics, 22, 257-270(2012).

[13] [13] Tapos F M, Edinger D J, Hilby T R, et al. High bwidth fast steering mirr [C]Proceedings of SPIE, 2005, 5877: 587707.

[14] Ernst C, Georg S. System design and control of a resonant fast steering mirror for Lissajous-based scanning[J]. IEEE/ASME Transactions on Mechatronics, 22, 1963-1972(2017).

[15] [15] Willstatter L, Mahon R, Ghizi J, et al. acterization of faststeering mirrs at both high low temperatures [C]Proceedings of SPIE, 2020, 11272: 112721K.

[16] Shao Bing, Sun Lining, Qu Dongsheng, . Research on the key technology of ATP system for free space optical communication[J]. Piezoelectrics & Acoustooptics, 27, 431-433(2005).

[17] Xiang Sihua, Chen Sihai, Wu Xin, . Laser scanner based on novel piezoelectric actuators[J]. Infrared and Laser Engineering, 39, 67-70, 75(2010).

[18] Yuan Gang, Wang Daihua, Li Shidong, . Piezoelectric fast steering mirror with large excursion angle[J]. Optics and Precision Engineering, 23, 2258-2264(2015).

[19] Ran Bing, Zhao Dizhi, Wen Lianghua. Research on dynamic stress of piezoelectric fast steering mirror stacked PZT actuator[J]. Laser & Optoelectronics Progress, 59, 0523001(2022).

[20] [20] Ning Yu. Perfmance test application study of a bimph defmable mirr[D]. Changsha: National University of Defence Technology, 2008: 2335. (in Chinese)

[21] [21] Miller L M, Agronin M L, Bartman R K, et al. Fabrication acterization of a micromachined defmable mirr f adaptive optics applications [C]Proceedings of SPIE, 1993, 1945: 421430.

[22] Krishnamoorthy R, Bifano T G, Vandelli N, et al. Development of microelectromechanical deformable mirrors for phase modulation of light[J]. Optical Engineering, 36, 542-548(1997).

[23] Xie Huikai, Pan Yingtian, Fedder G K. A CMOS-MEMS mirror with curled-hinge comb drives[J]. Journal of Microelectromechanical Systems, 12, 450-457(2003).

[24] Cornelissen S A, Bierden P A, Bifano T G, et al. 4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging[J]. Journal of Micro-nanolithography MEMS and MOEMS, 8, 031308(2009).

[25] Bai Yanhui, Yeow J T W, Wilson B C. Design, fabrication, and characteristics of a MEMS micromirror with sidewall electrodes[J]. Journal of Microelectromechanical Systems, 19, 619-631(2010).

[26] Afrang S, Mobki H, Hassanzadeh M, et al. Design and simulation of a MEMS analog micro-mirror with improved rotation angle[J]. Microsystem Technologies-Micro and Nanosystems Information Storage and Processing Systems, 25, 1099-1109(2019).

[27] Zhuang Xuye, Wang Weimin, Tao Fenggang, . Development of non-perpendicular 2D MEMS tilt mirrors[J]. Optics and Precision Engineering, 19, 1845-1851(2011).

[28] Hu Fangrong, Yao Jun. Microelectromechanical systems deformable mirror actuator based on electrostatic repulsive force[J]. High Power Laser and Particle Beams, 22, 41-44(2010).

[29] Wang Weimin, Wang Qiang. Development and characterization of a 140-element MEMS deformable mirror[J]. Opto-Electronic Engineering, 45, 104-112(2018).

[30] [30] Wang Jian. Research on acteristic of transceiving systems of intersatellite laser communication based on acoustooptic deflects[D]. Harbin: Harbin Institute of Technology, 2015. (in Chinese)

[31] [31] Kpel A. AcoustoOptics [M]. 2nd ed. New Yk: Marcel Dekker, Inc, 1997.

[32] [32] Li Jie. Research on the optimum design of broadb acoustooptic deflect[D]. Shijiazhuang: Hebei Nmal University, 2016. (in Chinese)

[33] Antonov S N, Vainer A V, Proklov V V, et al. Extension of the angular scanning range of the acousto-optic deflector with a two-element phased-array piezoelectric transducer[J]. Technical Physics, 58, 1346-1351(2013).

[34] Antonov S N. Acousto-optic deflector of depolarized laser radiation[J]. Technical Physics, 61, 134-137(2016).

[35] Antonov S N. Acousto-optic deflector with a high diffraction efficiency and wide angular scanning range[J]. Acoustical Physics, 64, 432-436(2018).

[36] Antonov S N, Rezvov Y G. An Acousto-optical deflector based on paratellurite: increasing the thermal stability of parameters[J]. Instruments and Experimental Techniques, 64, 729-733(2021).

[37] Peled I, Kaminsky R, Kotler Z. Acousto-optics bandwidth broadening in a Bragg cell based on arbitrary synthesized signal methods[J]. Applied Optics, 54, 5065-5073(2015).

[38] Li Gongyu, Liu Dali. Study of chirp acoustooptic surface wave transducer[J]. Journal of Changchun Post and Telecomm-Unication Institute, 18, 23-27(2000).

[39] He Xiaoliang, Liu Wei, Zhou Jianguo, . Application of high-resolution acoustooptic deflector on spectrum analysis[J]. Piezoelectrics & Acoustooptics, 27, 16-17, 28(2005).

[40] Yu Kuanxin, Mi Yinmei, Suo Meng. Optimal design of TeO₂ ultrasonic beam steering anisotropic acousto-optic deflector[J]. Piezoelectrics & Acoustooptics, 29, 510-512, 529(2007).

[41] Zhang Zehong, Lu Chuan, He Xiaoliang, . Study on acousto-optic deflector based on gallium phosphide[J]. Piezoelectrics & Acoustooptics, 36, 694-697(2014).

[42] Zhang Zehong, He Xiaoliang. Abnormal acousto-optic deflector with large-bandwidth[J]. Piezoelectrics & Acoustooptics, 38, 837-839(2016).

[43] Xia Qian, Chen Qinghua, Zhang Zehong, . Study on antistatic of high frequency acousto-optic deflector[J]. Piezoelectrics & Acoustooptics, 43, 51-53, 58(2021).

[44] [44] McManamon P F. An overview of optical phased array technology status [C]Proceedings of SPIE, 2005, 5947: 594701.

[45] Mcmanamon P F, Dorschner T A, Corkum D L, et al. Optical phased array technology[J]. Proc of the IEEE, 84, 268-298(1996).

[46] Sharp R C, Resler D P, Hobbs D S, et al. Electrically tunable liquid-crystal wave plate in the infrared[J]. Optics Letters, 15, 87-89(1990).

[47] Engstrom D, O'Callaghan M J, Walker C, et al. Fast beam steering with a ferroelectric-liquid-crystal optical phased array[J]. Applied Optics, 48, 1721-1726(2009).

[48] Peng F, Lee Y H, Luo Z, et al. Low voltage blue phase liquid crystal for spatial light modulators[J]. Optics Letters, 40, 5097-5100(2015).

[49] Li S Q, Xu X W, Veetil R M, et al. Phase-only transmissive spatial light modulator based on tunable dielectric metasurface[J]. Science, 364, 1087-1090(2019).

[50] Zhang Jian, Xu Lin, Wu Liying, . Programmable beam steering based on liquid crystal optical phased array[J]. Acta Photonica Sinica, 37, 1497-1502(2008).

[51] [51] Sun Yangdong. Research application of phased array laser radar wave control technology[D]. Chengdu: University of Electronic Science Technology of China, 2011. (in Chinese)

[52] Wang X, Wu L, Xiong C, et al. Agile laser beam deflection with high steering precision and angular resolution using liquid crystal optical phased array[J]. IEEE Transactions on Nanotechnology, 17, 26-28(2018).

[53] Mcmanamon P F. Agile Nonmechanical beam steering[J]. Optical Photonics News, 17, 24-29(2006).

[54] Goltsos W C, Holz M. Agile beam steering using binary optics microlens arrays[J]. Optical Engineering, 29, 1392-1397(1990).

[55] [55] Watson E A, Whitaker W E, Brewer C D, et al. Implementing optical phased array beam steering with caded microlens arrays [C]Proceedings of the IEEE Aerospace Conference, 2002: 14291436.

[56] Shi Lei, Shi Jianru, Mcmanamon P F, et al. Design considerations for high efficiency liquid crystal decentered microlens arrays for steering light[J]. Applied Optics, 49, 409-421(2010).

[57] Li Liwei, Bryant D, Bos P J. Liquid crystal lens with concentric electrodes and inter-electrode resistors[J]. Liquid Crystals Reviews, 2, 130-154(2014).

[58] Beeckman J, Yang T-H, Nys I, et al. Multi-electrode tunable liquid crystal lenses with one lithography step[J]. Optics Letters, 43, 271-274(2018).

[60] [60] Dong Shan. Research on beam steering with microlens arrays[D]. Wuhan: Huazhong University of Science & Technology, 2007. (in Chinese)

[61] Xie Hongbo, Wang Yao, Mao Chensheng, . Micro-lens array for integrative transmitting and receiving continuous scanning[J]. Journal of Applied Optics, 39, 613-618(2018).

[62] [62] Chen Mingce, Li Zheng, Shao Qi, et al. A new type of liquidcrystal cylindrical microlens arrays with nonunifm microcoil electrodes [C]Proceedings of SPIE, 2019, 10941: 109410U.

[63] Li Rui, Chu Fan, Dou Hu, et al. Double-layer liquid crystal lens array with composited dielectric layer[J]. Liquid Crystals, 47, 248-254(2020).

[64] Yang Xu, Geng Chao, Li Xiaoyang, . Review of microlens array optical phased array beam scanning technique[J]. High Power Laser and Particle Beams, 33, 69-79(2021).

[65] [65] Oh C, Kim J, Muth J M, et al. A new beam steering concept: Risley gratings [C]Proceedings of SPIE, 2009, 7466: 74660J.

[66] [66] Kim J, Oh C, Escuti M J, et al. Wideangle nonmechanical beam steering using thin liquid crystal polarization gratings [C]Proceedings of SPIE, 2008, 7093: 709302.

[67] [67] Kim J, Miskiewicz M N, Serati S. High efficiency quasiternary design f nonmechanical beamsteering utilizing polarization gratings [C]Proceedings of SPIE, 2010, 7816: 78160G.

[68] [68] Kim J, Miskiewicz M N, Serati S, et al. Demonstration of largeangle nonmechanical laser beam steering based on LC polymer polarization gratings [C]Proceedings of SPIE, 2011, 8052: 80520T.

[69] Kim J, Miskiewicz M N, Serati S, et al. Nonmechanical laser beam steering based on polymer polarization gratings: design optimization and demonstration[J]. Journal of Lightwave Technology, 33, 2086-2077(2015).

[70] Serati S, Hoy C L, Hosting L, et al. Large-aperture, wide-angle nonmechanical beam steering using polarization gratings[J]. Optical Engineering, 56, 031211(2016).

[71] Xiang X, Kim J, Escuti M J. Bragg polarization gratings for wide angular bandwidth and high efficiency at steep deflection angles[J]. Scientific Reports, 8, 467-475(2018).

[72] [72] Huang Shuaijia. The beam steering applications of polymer wk liquid crystal devices[D]. Shanghai: Shanghai Jiao Tong University, 2017. (in Chinese)

[75] [75] Li Songzhen. Design of liquid crystal polarizationn grating study of its beam deflect acteristics[D]. Beijing: University of Chinese Academy of Sciences, 2019. (in Chinese)

[76] Liu Bing, Wang Xuping, Yang Yuguo, . Principles, devices, and applications of beam deflection based on quadratic electro-optic effect of potassium tantalate niobate[J]. Laser & Optoelectronics Progress, 57, 071609(2020).

[77] Xu Guochang. The characteristics and design of the electro-optic deflector with quadrupole electrodes[J]. Journal of Southeast University, 22, 13-17(1992).

[78] Ai Yuexia, Li Jingzhen, Gong Xiangdong. Studies on electro-optic deflector with hypersurface electrode struture[J]. Acta Photonica Sinica, 35, 33-36(2006).

[79] Nakamura K, Miyazu J, Sasaura M, et al. Wide-angle, low-voltage electro-optic beam deflection based on space-charge-controlled mode of electrical conduction in KTa_1−xNb_xO₃[J]. Applied Physics Letters, 89, 131115(2006).

[80] Nakamara K, Miyazu J, Sasaki Y, et al. Space-charge-controlled electro-optic effect: Optical beam deflection by electro-optic effect and space-charge-controlled electrical conduction[J]. Journal of Applied Physics, 104, 013105(2008).

[81] Miyazu J, Imai T, Toyoda S, et al. New beam scanning model for high-speed operation using KTa_1−xNb_xO₃ crystals[J]. Applied Physics Express, 4, 111501(2011).

[82] Nakamara K, Miyazu J, Shogo Y. High-resolution KTN optical beam scanner[J]. NTT Technical Review, 7, 1-6(2009).

[83] Sasaki Y, Okabe Y, Ueno M, et al. Resolution enhancement of KTa_1−xNb_xO₃ electro-optic deflector by optical beam shaping[J]. Applied Physics Express, 6, 102201(2013).

[84] Imai T, Miyazu J, Kobayashi J. Charge distributions in KTa_1−xNb_xO₃ optical beam deflectors formed by voltage application[J]. Optics Express, 22, 14114-14126(2014).

[85] [85] Sasaki Y, Toyoda S, Sakamoto T, et al. Electrooptic KTN deflect stabilized with 405 nm light irradiation f wavelengthswept light source [C]Proceedings of SPIE, 2017, 10100: 101000H.

[86] Tatsumi S, Imai T, Yamaguchi J. Reduction of ambient temperature dependence of KTa_1−xNb_xO₃ electro-optic deflector by double-thermistor structure[J]. Precision Engineering, 59, 150-155(2019).

[87] [87] Chao J H, Zhu W B, Wang C, et al. Nanosecond speed preinjected space ge controlled KTN beam deflect [C]Proceedings of SPIE, 2015, 9586: 95860T.

[88] Zhu W, Chao J H, Chen C J, et al. Photon excitation enabled large aperture space-charge-controlled potassium tantalate niobate (KTN) beam deflector[J]. Applied Physics Letters, 112, 132901(2018).

[89] Kawamura S, Imai T, Miyazu J, et al. 2.5-fold increase in lens power of a KTN varifocal lens by employing an octagonal structure[J]. Applied Optics, 54, 4197-4201(2015).

[90] Chen C J, Chao J H, Lee Y G, et al. Enhanced electro-optic beam deflection of relaxor ferroelectric KTN crystals by electric-field-induced high permittivity[J]. Optical Letters, 44, 5557-5560(2019).

[91] Zhang J W, Du X P, Zhao J G, et al. Discrete electro-optic effect induced by multiscale nanoresonators[J]. Optical Materials, 127, 112271(2022).

[92] Chen C J, Chao J H, Lee Y G, et al. Analysis on the electric field distribution in a relaxor ferroelectric KTN crystal near field-induced phase transition using optical deflection measurements[J]. Optics Express, 28, 31034-31042(2020).

[93] Chen C J, Shang A N, Lee Y G, et al. Anomalous bi-directional scanning electro-optic KTN devices with UV-assisted electron and hole injections[J]. Optics Letters, 45, 5360-5363(2020).

[94] Lee Y G, Chen C J, Shang A N, et al. Enhanced c-axis KTN beam deflector by compensating compositional gradient effect with a thermal gradient[J]. OSA Continuum, 4, 665-671(2021).

[95] [95] Tang Y J, Wang J Y, Wang X P, et al. KTNbased electrooptic beam scanner [C]Proceedings of SPIE, 2008, 7135: 713538.

[96] Wang X P, Liu B, Yang Y G, et al. Anomalous laser deflection phenomenon based on the interaction of electro-optic and graded refractivity effects in Cu-doped KTa_1-xNb_xO₃ crystal[J]. Applied Physics Letters, 105, 051910(2014).

[97] [97] Wang Shuang. The applied research of the temperature controlled light beam deflection based on lithium niobate crystal [D]. Harbin: Harbin Institute of Technology, 2017. (in Chinese)

[98] Tian F, Lu H, Sui Z, et al. Electro-optic deflection in a lithium niobate quasi-single mode waveguide with microstructured electrodes[J]. Optics Express, 26, 30100-30107(2018).

[99] [99] Ma Xiangguo. Study on the they experiment of optical programmable electronically controlled beam deflection [D]. Tianjin: Tianjin University, 2019. (in Chinese)

[100] [100] Xing Bohan. Study on controllable frequency doubling modulation deflection properties of lithium niobate crystal [D]. Harbin: Harbin Institute of Technology, 2021. (in Chinese)