International Journal of Extreme Manufacturing, Volume. 6, Issue 2, 25102(2024)
Elliptical vibration chiseling:a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface
[1] [1] Xuan Z Y, Li J Y, Liu Q Q, Yi F, Wang S W and Lu W 2021 Artificial structural colors and applications Innovation2 100081
[2] [2] Mori S and Utaka Y 2017 Critical heat flux enhancement by surface modification in a saturated pool boiling: a review Int. J. Heat Mass Transfer 108 2534–57
[3] [3] Higgins S G, Becce M, Belessiotis-Richards A, Seong H,Sero J E and Stevens M M 2020 High-aspect-ratio nanostructured surfaces as biological metamaterials Adv.Mater. 32 1903862
[4] [4] Wang W, He Y Y, Zhao J, Mao J Y, Hu Y T and Luo J B 2020 Optimization of groove texture profile to improve hydrodynamic lubrication performance: theory and experiments Friction 8 83–94
[5] [5] Gimeno S, Mescheder H, Quintana I, Gasión A,Arias-Egido E, Carbonell A, Mallo C, Miguel I, Paredes J and Zalakain I 2023 Effect of different laser texturing patterns on rolling contact surface and its tribological & fatigue life behavior on 100Cr6 bearing steel Wear522 204717
[6] [6] Du H H, Zhu Z W, Wang Z K and To S 2023 Fabrication of high-aspect-ratio and hierarchical micro/nanostructure arrays by a novel piezoelectrically actuated cutting system Mater. Des. 226 111660
[7] [7] Long J Y, Liu Z Y, Lin H P, Li Y, Cao Z, Zhang Z C and Xie X Z 2022 Pool boiling heat transfer and bubble dynamics over V-shaped microchannels and micropyramids: does high aspect ratio always benefit boiling? Appl. Therm. Eng. 201 117796
[8] [8] He Y, Yan Y D, Geng Y Q and Brousseau E 2018 Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope Appl. Surf. Sci. 427 1076–83
[9] [9] Anscombe N 2010 Direct laser writing Nat. Photon. 4 22–23
[10] [10] Feinaeugle M, Pohl R, Bor T, Vaneker T and R?mer G W 2018 Printing of complex free-standing microstructures via laser-induced forward transfer (LIFT) of pure metal thin films Addit. Manuf. 24 391–9
[11] [11] Tong H, Li Y, Wang Y and Yu D W 2008 Servo scanning 3D micro-EDM based on macro/micro-dual-feed spindle Int. J.Mach. Tools Manuf. 48 858–69
[12] [12] Wu B Q, Kumar A and Pamarthy S 2010 High aspect ratio silicon etch: a review J. Appl. Phys. 108 051101
[13] [13] Chang B D, Leussink P, Jensen F, Hübner J and Jansen H 2018 DREM: infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process Microelectron. Eng.191 77–83
[14] [14] Palneedi H et al 2018 Laser irradiation of metal oxide films and nanostructures: applications and advances Adv. Mater.30 1705148
[15] [15] Zhang D S, Liu R J and Li Z G 2022 Irregular LIPSS produced on metals by single linearly polarized femtosecond laser Int. J. Extrem. Manuf. 4 015102
[16] [16] Zhu Q C, Fan P X, Li N, Carlson T, Cui B, Silvain J F,Hudgins J L and Lu Y F 2021 Femtosecond-laser sharp shaping of millimeter-scale geometries with vertical sidewalls Int. J. Extrem. Manuf. 3 045001
[17] [17] Buividas R, Rekˇstyt? S M, Malinauskas M and Juodkazis S 2013 Nano-groove and 3D fabrication by controlled avalanche using femtosecond laser pulses Opt. Mater.Express 3 1674–86
[18] [18] Bonse J, H?hm S, Kirner S V, Rosenfeld A and Krüger J 2017 Laser-induced periodic surface structures—a scientific evergreen IEEE J. Sel. Top. Quantum Electron. 23 9000615
[19] [19] Gu D D, Shi X Y, Poprawe R, Bourell D L, Setchi R and Zhu J H 2021 Material-structure-performance integrated laser-metal additive manufacturing Science 372 eabg1487
[20] [20] Bellotti M, De Eguilior Caballero J R, Qian J and Reynaerts D 2021 Effects of partial tool engagement in micro-EDM milling and adaptive tool wear compensation strategy for efficient milling of inclined surfaces J. Mater. Process.Technol. 288 116852
[21] [21] Li L G, Wang P T, Shao Q and Huang X Q 2020 Metallic nanostructures with low dimensionality for electrochemical water splitting Chem. Soc. Rev. 49 3072–106
[22] [22] Zhang Q, Li P S, Zhou D J, Chang Z, Kuang Y and Sun X M 2017 Superaerophobic ultrathin Ni–Mo alloy nanosheet array from in situ topotactic reduction for hydrogen evolution reaction Small 13 1701648
[23] [23] Kuang Y, Feng G, Li P S, Bi Y M, Li Y P and Sun X M 2016 Single-crystalline ultrathin nickel nanosheets array from in situ topotactic reduction for active and stable electrocatalysis Angew. Chem, Int. Ed. 55 693–7
[24] [24] Zhu D and Zeng Y B 2008 Micro electroforming of high-aspect-ratio metallic microstructures by using a movable mask CIRP Ann. 57 227–30
[25] [25] Zhou B, Su B, Li M and Meng J H 2020 Microelectroforming of freestanding metallic microcomponents using silver-coated poly(dimethylsiloxane) molds J. Micromech. Microeng. 30 045013
[26] [26] Li M, Liu J, Zhang X P, Tian Y Q and Jiang K 2018 Fabrication of graphene/nickel composite microcomponents using electroforming Int. J. Adv. Manuf. Technol. 96 3191–6
[27] [27] Liu J, Hassanin H, Ni Z Y, Yang Y, Yang G and Jiang K 2017 Production of high-precision micro metallic components by electroforming process Mater. Manuf. Process. 32 1325–30
[28] [28] Kuang P, Park J M, Leung W, Kim T G, Ho K M and Constant K 2010 High aspect ratio nanoscale metallic structures as transparent electrodes Proc. SPIE7756 77560M
[29] [29] Kang M G, Kim M S, Kim J and Guo L J 2008 Organic solar cells using nanoimprinted transparent metal electrodes Adv. Mater. 20 4408–13
[30] [30] Kang M G and Guo L J 2007 Nanoimprinted semitransparent metal electrodes and their application in organic light-emitting diodes Adv. Mater. 19 1391–6
[31] [31] Li H C, Tang H, Li J D and Chen X 2021 Design, fabrication,and testing of a 3-DOF piezo fast tool servo for microstructure machining Precis. Eng. 72 756–68
[32] [32] Zhou T F, Zhou J, Wang T X, Gao L H, Ruan B S, Yu Q,Zhao W X and Wang X B 2022 Fabrication of high aspect-ratio aspheric microlens array based on local spiral diamond milling J. Manuf. Process. 83 547–54
[33] [33] Jiang M N et al 2022 Inhibiting the Leidenfrost effect above1000 ?C for sustained thermal cooling Nature 601 568–72
[34] [34] Zhou J, Zhou T F, Wang T X, Ruan B S, Zhao W X and Wang X B 2023 Study on the tool setting for microlens array machining via swing cutting J. Manuf. Process.85 636–44
[35] [35] Miao Q, Ding W F, Xu J H, Cao L J, Wang H C, Yin Z,Dai C W and Kuang W J 2021 Creep feed grinding induced gradient microstructures in the superficial layer of turbine blade root of single crystal nickel-based superalloy Int. J.Extrem. Manuf. 3 045102
[36] [36] Shamoto E and Moriwaki T 1994 Study on elliptical vibration cutting CIRP Ann. 43 35–38
[37] [37] Kong L B and Cheung C F 2012 Modeling and characterization of surface generation in fast tool servo machining of microlens arrays Comput. Ind. Eng.63 957–70
[38] [38] Pratap T and Patra K 2018 Fabrication of micro-textured surfaces using ball-end micromilling for wettability enhancement of Ti-6Al-4V J. Mater. Process. Technol.262 168–81
[39] [39] de Oliveira D, Gomes M C, de Oliveira G V, Dos Santos A G and da Silva M B 2021 Experimental and computational contribution to chip geometry evaluation when micromilling Inconel 718 Wear 476 203658
[40] [40] Zhang G Q, Ma S, Wang J P, Jiang J K, Luo T and Wang H T 2022 Offset-tool-servo diamond end flycutting multi-layer hierarchical microstructures Int. J. Mech. Sci. 233 107645
[41] [41] Huang Y, Huang J C, Xiao G J, Lin O C, Liu S, Liu Z Y and Wu C J 2023 Morphology and wettability analysis of square micropillar structure prepared by laser-belt machining on Inconel 718 alloy surface Int. J. Adv. Manuf. Technol.127 3919–33
[42] [42] Yang Z C, Zhu L D, Zhang G X, Ni C B and Lin B 2020 Review of ultrasonic vibration-assisted machining in advanced materials Int. J. Mach. Tools Manuf. 156 103594
[43] [43] Zhang J G, Cui T, Ge C, Sui Y and Yang H J 2016 Review of micro/nano machining by utilizing elliptical vibration cutting Int. J. Mach. Tools Manuf. 106 109–26
[44] [44] Yang J C, Feng P F, Zhang J F, Yang H L and Wang J J 2023 On the oxidation resistance of sinusoidal microstructure fabricated by elliptical vibration cutting Surf. Coat. Technol.459 129370
[45] [45] Wang J J, Du H H, Gao S M, Yang Y, Zhu Z W and Guo P2019 An ultrafast 2D non-resonant cutting tool for texturing micro-structured surfaces J. Manuf. Process. 48 86–97
[46] [46] Zhang H W, Feng P F, Feng F, Zhang J F, Wang C J and Wang J J 2023 Structural coloration with two-dimensional nanostructures fabricated by elliptical vibration nanoindentation Precis. Eng. 82 219–32
[47] [47] Chen K Y, Si C and Guo P 2017 Design of a high bandwidth nonresonant tertiary motion generator for elliptical vibration texturing J. Micro Nano-Manuf. 5 011008
[48] [48] Guo P and Ehmann K F 2013 Development of a tertiary motion generator for elliptical vibration texturing Precis.Eng. 37 364–71
[49] [49] Kurniawan R, Kiswanto G and Ko T J 2016 Micro-dimple pattern process and orthogonal cutting force analysis of elliptical vibration texturing Int. J. Mach. Tools Manuf.106 127–40
[50] [50] Guo P and Ehmann K F 2013 An analysis of the surface generation mechanics of the elliptical vibration texturing process Int. J. Mach. Tools Manuf. 64 85–95
[51] [51] Chen Z M, Feng P F, Zhang J F, Feng F, Zhang H W, Yu J H and Wang J J 2023 Shaped vibration cutting: a novel fabrication method for mid-infrared relief gratings with controllable profiles J. Mater. Process. Technol. 317 118007
[52] [52] Wang Z J, Luo X C, Liu H T, Ding F, Chang W L, Yang L,Zhang J G and Cox A 2021 A high-frequency non-resonant elliptical vibration-assisted cutting device for diamond turning microstructured surfaces Int. J. Adv. Manuf.Technol. 112 3247–61
[53] [53] Zheng Z P, Zhang J F, Feng P F, Li Z W and Wang J J 2022 Fabrication of hierarchical micro/nanostructures on titanium alloy by combining rotary ultrasonic milling and anodizing Manuf. Lett. 34 43–48
[54] [54] Zhang J, Suzuki N and Shamoto E 2013 Investigation on machining performance of amplitude control sculpturing method in elliptical vibration cutting Proc. CIRP 8 328–33
[55] [55] Kurniawan R and Ko T J 2014 A new tool holder design with two-dimensional motion for fabricating micro-dimple and groove patterns Int. J. Precis. Eng. Manuf. 15 1165–71
[56] [56] Zhang C, Shi G L and Ehmann K F 2017 Investigation of hybrid micro-texture fabrication in elliptical vibration-assisted cutting Int. J. Mach. Tools Manuf.120 72–84
[57] [57] Kurniawan R, Ali S, Park K M, Jung S T and Ko T J 2019 Experimental study of microgroove surface using three-dimensional elliptical vibration texturing J. Micro Nano-Manuf. 7 024502
[58] [58] Wang J J, Yang R, Gao S M, Weng F, Wang Y K, Liao W H and Guo P 2020 Modulated vibration texturing of hierarchical microchannels with controllable profiles and orientations CIRP J. Manuf. Sci. Technol. 30 58–67
[59] [59] Zheng Z P, Zhang J F, Feng P F and Wang J J 2023 Controllable fabrication of microstructures on the metallic surface using oblique rotary ultrasonic milling Int. J. Mech.Sci. 237 107805
[60] [60] Song Y, Díaz-Marín C D, Zhang L N, Cha H, Zhao Y J and Wang E N 2022 Three-tier hierarchical structures for extreme pool boiling heat transfer performance Adv. Mater.34 2200899
[61] [61] Kim T, Kwon S, Lee J, Lee J and Kang S 2022 A metallic anti-biofouling surface with a hierarchical topography containing nanostructures on curved micro-riblets Microsyst. Nanoeng. 8 6
[62] [62] Zhang Y M et al 2022 Cell osteogenic bioactivity mediated precisely by varying scaled micro-pits on ordered micro/nano hierarchical structures of titanium Regen.Biomater. 9 rbac046
[63] [63] Merchant M E 1945 Mechanics of the metal cutting process. I.Orthogonal cutting and a type 2 chip J. Appl. Phys.16 267–75
[64] [64] Yin S, Wang X F, Xu B P and Li W Y 2010 Examination on the calculation method for modeling the multi-particle impact process in cold spraying J. Therm. Spray Technol.19 1032–41
[65] [65] Grazka M and Janiszewski J 2012 Identification of Johnson-cook equation constants using finite element method Eng. Trans. 60 215–23 (available at: https://et.ippt.gov.pl/index.php/et/article/view/113)
[66] [66] Cheng K and Huo D H 2013 Micro-Cutting: Fundamentals and Applications (Wiley) (https://doi.org/10.1002/9781118536605)
[67] [67] Li Z H, Yan Y D, Hu X, Xu C Y, Li Y and Geng Y Q 2023 Nanomachining of van der Waals nanowires: process and deformation mechanism Int. J. Mach. Tools Manuf.188 104018
[68] [68] Merchant M E 1945 Mechanics of the metal cutting process.II. Plasticity conditions in orthogonal cutting J. Appl. Phys.16 318–24
[69] [69] Yang Y, Xiang J Q and Zhao Z J 2023 An analytical cutting force model for elliptical vibration texturing of nano-grating surfaces J. Mater. Process. Technol. 315 117901
[70] [70] Lu H, Zhu L D, Yang Z C, Lu H, Yan B L, Hao Y P and Qin S Q 2021 Research on the generation mechanism and interference of surface texture in ultrasonic vibration assisted milling Int. J. Mech. Sci. 208 106681
[71] [71] Liu X F, Zhang J H, Hu X Y and Wu D B 2019 Influence of tool material and geometry on micro-textured surface in radial ultrasonic vibration-assisted turning Int. J. Mech. Sci.152 545–57
[72] [72] Du H H, Yip W, Zhu Z W and To S 2021 Development of a two-degree-of-freedom vibration generator for fabricating optical microstructure arrays Opt. Express 29 25903–21
[73] [73] Shen X H, Shi Y L, Zhang J H, Zhang Q J, Tao G C and Bai L J 2020 Effect of process parameters on micro-textured surface generation in feed direction vibration assisted milling Int. J. Mech. Sci.167 105267
[74] [74] B?rner R, Winkler S, Junge T, Titsch C, Schubert A and Drossel W G 2018 Generation of functional surfaces by using a simulation tool for surface prediction and micro structuring of cold-working steel with ultrasonic vibration assisted face milling J. Mater. Process. Technol. 255 749–59
[75] [75] Li Z W, Zhang J F, Zheng Z P, Feng P F, Yu D W and Wang J J 2023 Vibration chiseling: a backward-moving cutting for the high-efficiency fabrication of short metallic microfibers Manuf. Lett. 36 80–85
[76] [76] Guo X G, Li Y, Cai L Q, Guo J, Kang R K, Jin Z J and Guo D M 2020 Effects of tool edge radius on chip formation during the micromachining of pure iron Int. J. Adv. Manuf. Technol. 108 2121–30
Get Citation
Copy Citation Text
Zhiwei Li, Jianfu Zhang, Zhongpeng Zheng, Pingfa Feng, Dingwen Yu, Jianjian Wang. Elliptical vibration chiseling:a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface[J]. International Journal of Extreme Manufacturing, 2024, 6(2): 25102
Received: Aug. 15, 2023
Accepted: --
Published Online: Sep. 6, 2024
The Author Email: Wang Jianjian (wangjjthu@tsinghua.edu.cn)