Acta Physica Sinica, Volume. 68, Issue 18, 185202-1(2019)

Numerical investigation on interaction mechanisms between flow field and electromagnetic field for nonequilibrium inductively coupled plasma

Ming-Hao Yu*
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Ming-Hao Yu. Numerical investigation on interaction mechanisms between flow field and electromagnetic field for nonequilibrium inductively coupled plasma[J]. Acta Physica Sinica, 2019, 68(18): 185202-1

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Paper Information

Received: Jun. 3, 2019

Accepted: --

Published Online: Jun. 28, 2020

The Author Email:

DOI:10.7498/aps.68.20190865

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