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Optoelectronics Letters, Volume. 13, Issue 1, 45(2017)

Effects of etching conditions on surface morphology of periodic inverted trapezoidal patterned Si(100) substrate

Lu ZHANG... Guo-dong YUAN*, Qi WANG, Ke-chao WANG, Ruiwei WU, Zhi-qiang LIU, Jin-min LI and Jun-xi WANG |Show fewer author(s)
Author Affiliations
  • State Key Laboratory of Solid State Lighting, Beijing Engineering Research Center for the 3rd Generation Semiconductor Materials and Application, Research and Development Center for Solid State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
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    ZHANG Lu, YUAN Guo-dong, WANG Qi, WANG Ke-chao, WU Ruiwei, LIU Zhi-qiang, LI Jin-min, WANG Jun-xi. Effects of etching conditions on surface morphology of periodic inverted trapezoidal patterned Si(100) substrate[J]. Optoelectronics Letters, 2017, 13(1): 45

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    Paper Information

    Category: Materials

    Received: Oct. 31, 2016

    Accepted: Nov. 29, 2016

    Published Online: Sep. 13, 2018

    The Author Email: Guo-dong YUAN (gdyuan@semi.ac.cn)

    DOI:10.1007/s11801-017-6242-3

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology