[1] [1] ZHAO Hui-xu, CHEN Xin-liang, YANG Xu, et al. Improved properties of boron-doped zinc oxide films with In2O3:Sn inter layers for solar cells［J］. Acta Physica Sinica , 2014, 65(5): 056801.

[2] [2] LIU Hao, XUE Yu-ming, QIAO Zai-xiang, et al. Progress of application research on Cu2ZnSnS4 thin film and its devices［J］. Acta Physica Sinica , 2015, 64(6): 068801.

[3] [3] XUE Ding-jiang, SHI Hang-jie, TANG Jiang. Recent progress in material study and photovoltaic device of Sb2Se3［J］. Acta Physica Sinica , 2015, 64(3): 038406.

[4] [4] CHASON E, ENGWALL A M. Relating residual stress to thin film growth processes via a kinetic model and real-time experiments［J］. Thin Solid Films, 2015, 59: 2-7.

[5] [5] INJETI S S, ANNABATTULA R K. Extending Stoney's equation to thin, elastically anisotropic substrates and bilayer films［J］. Thin Solid Films, 2016, 598: 252-259.

[6] [6] MZIN A, HEMEL A. Measuring coating internal stresses by the curvature method applied to a beveled sample［J］. Surface & Coatings Technology, 2014, 258: 1128-1136.

[7] [7] MIKI Y, NISHIMOTO A, SONE T, et al. Residual stress measurement in DLC films deposited by PBIID method using Raman microprobe spectroscopy［J］. Surface & Coatings Technology, 2015, 283: 274-280.

[8] [8] WANG A N, HUANG J H, HSIAO H W, et al. Residual stress measurement on TiN thin films by combing nanoindentation and average X-ray strain (AXS) method［J］. Surface and Coatings Technology, 2015, 280: 43-49.

[9] [9] BEMPORAD E, BRISOTTO M, DEPERO L E, et al. A critical comparison between XRD and FIB residual stress measurement techniques in thin films［J］. Thin Solid Films, 2014, 572: 224-231.

[10] [10] CHEN Z, XU X, WONG C C, et al. Effect of plating parameters on the intrinsic stress in electroless nickel plating［J］. Surface and Coatings Technology, 2003, 167(2): 170-176.

[11] [11] SONG J Y, YU J. Residual stress measurements in electroless plated Ni-P films［J］. Thin Solid Films, 2002, 415(1): 167-172.

[12] [12] BRNING R, MUIR B, MCCALLA E, et al. Strain in electroless copper films monitored by X-ray diffraction during and after deposition and its dependence on bath chemistry［J］. Thin Solid Films, 2011, 519(13): 4377-4383.

[13] [13] YU You-long, XUE Hang, WANG Yan-xiao, et al. Temperature distributed sensing technique for the Local-area of the surface［J］. Acta Photonica Sinica, 2014, 43(5): 0506001.

[14] [14] JIANG Shan-chao, SUI Qing-mei, WANG Jing, et al. FBG turbine flow sensor for acquiring flow rate and temperature simultaneously［J］. Optics and Precision Engineering, 2014, 22(10): 2611-2616.

[15] [15] WANG Hong-liang, SONG Juan, FENG De-quan, et al. High temeprature-pressure FBG sensor applied to special environments［J］. Optics and Precision Engineering, 2011, 19（3）：545-551.

[16] [16] DOERNER M F, NIX W D. Stresses and deformation processes in thin films on substrates［J］. Critical Reviews in Solid State and Material Sciences, 1988, 14(3): 225-268.

[18] [18] HU Liao-lin, ZHANG Wei-chao. Temperature compensation of FBG strain measurement based on reference FBG［J］. Research and Exploration in Laboratory, 2014, 13(14): 41-45.

[19] [19] LI Y L, ZHANG H, FENG Y, et al. A plating method for metal coating of fiber Bragg grating［J］. Chinese Optics Letters, 2009, 7(2): 115-117.

[20] [20] CHEN Z, XU X, WONG C C, et al. Effect of plating parameters on the intrinsic stress in electroless nickel plating［J］. Surface and Coatings Technology, 2003, 167(2): 170-176.

[21] [21] YU Y H, LAI M O, LU L, et al. Measurement of residual stress of PZT thin film on Si (100) by synchrotron X-ray rocking curve technique［J］. Journal of Alloys and Compounds, 2008, 449(1): 56-59.

[22] [22] FANG Xiao-kun, AN Yu-ying, LIN Xiao-chun. New device on measuring thin film stress by laser reflect measurement［J］. Infrared and Laser Engineering, 2006, 36(s1): 693-695.