Optics and Precision Engineering, Volume. 28, Issue 10, 2290(2020)

Effect of different mounting modes on embedded time grating measuring errors

SUN Shi-zheng*... ZHOU Qing-song, HAN Yu and HE Ze-yin |Show fewer author(s)
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    References(32)

    [6] [6] PENG D L, LI Y, FU M, et al.. Study on parasitic time grating sensors used for mechanical transmission error measurement under harsh and special environment[J]. Chinese Journal of Scientific Instrument, 2013, 34(2): 359-365. (in Chinese)

              PENG D L, LI Y, FU M, et al.. Study on parasitic time grating sensors used for mechanical transmission error measurement under harsh and special environment[J]. Chinese Journal of Scientific Instrument, 2013, 34(2): 359-365. (in Chinese)

    [7] [7] PENG D L, FU M , CHEN X H, et al.. Classification study on typical displacement sensors and analysis on the characteristics of time grating sensors[J]. Journal of Mechanical Engineering, 2018, 54(10): 36-42. (in Chinese)

              PENG D L, FU M , CHEN X H, et al.. Classification study on typical displacement sensors and analysis on the characteristics of time grating sensors[J]. Journal of Mechanical Engineering, 2018, 54(10): 36-42. (in Chinese)

    [8] [8] WU L, PENG D L, TANG Q F, et al.. Measurement principle and structure optimization of parasitic time grating displacement sensor[J]. Chinese Journal of Scientific Instrument, 2016, 17(5): 976-984. (in Chinese)

              WU L, PENG D L, TANG Q F, et al.. Measurement principle and structure optimization of parasitic time grating displacement sensor[J]. Chinese Journal of Scientific Instrument, 2016, 17(5): 976-984. (in Chinese)

    [9] [9] YANG H T, ZHANG L SH, FEI Y T, et al.. Error source analysis and verification of parasitic time grating angular displacement sensor[J]. Journal of Huazhong University of Science of Technology(Natural Science Edition), 2016, 44(6): 40-45. (in Chinese)

              YANG H T, ZHANG L SH, FEI Y T, et al.. Error source analysis and verification of parasitic time grating angular displacement sensor[J]. Journal of Huazhong University of Science of Technology(Natural Science Edition), 2016, 44(6): 40-45. (in Chinese)

    [10] [10] LIU X K, PENG K, WANG X Q, et al.. Theoretical model and error analysis of nanometer time grating displacement sensor[J]. Chinese Journal of Scientific Instrument, 2014, 35(5): 1136-1142. (in Chinese)

              LIU X K, PENG K, WANG X Q, et al.. Theoretical model and error analysis of nanometer time grating displacement sensor[J]. Chinese Journal of Scientific Instrument, 2014, 35(5): 1136-1142. (in Chinese)

    [11] [11] LIU X K, PU H J, ZHENG F Y, et al.. Research on electric field distribution and error characteristics of the nanometer time grating displacement sensor[J]. Chinese Journal of Scientific Instrument, 2013, 34(10): 2257 -2264. (in Chinese)

              LIU X K, PU H J, ZHENG F Y, et al.. Research on electric field distribution and error characteristics of the nanometer time grating displacement sensor[J]. Chinese Journal of Scientific Instrument, 2013, 34(10): 2257 -2264. (in Chinese)

    [12] [12] FAN B, CHEN X H, XIAO CH H, et al.. Research on mathematical and physical model of magnetic displacement sensor error[J]. Chinese Journal of Scientific Instrument, 2016, 17(5): 985 -992. (in Chinese)

              FAN B, CHEN X H, XIAO CH H, et al.. Research on mathematical and physical model of magnetic displacement sensor error[J]. Chinese Journal of Scientific Instrument, 2016, 17(5): 985 -992. (in Chinese)

    [14] [14] PENG K , LIU X K , CHEN Z R , et al.. Sensing mechanism and error analysis of a capacitive long-range displacement nanometer sensor based on time grating[J]. IEEE SENS J, 2017, 17(6): 1596-1607.

              PENG K , LIU X K , CHEN Z R , et al.. Sensing mechanism and error analysis of a capacitive long-range displacement nanometer sensor based on time grating[J]. IEEE SENS J, 2017, 17(6): 1596-1607.

    [16] [16] SUN SH ZH, PENG D L, FU M , et al.. Probe design method for improving the precision of embedded time grating sensor[J]. Chinese Journal of Scientific Instrument, 2015, 36(1): 26-31. (in Chinese)

              SUN SH ZH, PENG D L, FU M , et al.. Probe design method for improving the precision of embedded time grating sensor[J]. Chinese Journal of Scientific Instrument, 2015, 36(1): 26-31. (in Chinese)

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    SUN Shi-zheng, ZHOU Qing-song, HAN Yu, HE Ze-yin. Effect of different mounting modes on embedded time grating measuring errors[J]. Optics and Precision Engineering, 2020, 28(10): 2290

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    Paper Information

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    Received: Apr. 16, 2020

    Accepted: --

    Published Online: Nov. 25, 2020

    The Author Email: Shi-zheng SUN (ssz091011@163.com)

    DOI:10.37188/ope.20202810.2290

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