Laser & Optoelectronics Progress, Volume. 58, Issue 19, 1900005(2021)
Research Progress in Femtosecond Laser Machining Mechanism and Simulation Analysis
[1] Chen Y Q, Wang J H[M]. Laser principle, 24-36(1992).
[6] He F, Cheng Y. Femtosecond laser micromachining: frontier in laser precision micromachining[J]. Chinese Journal of Lasers, 34, 595-622(2007).
[12] Xia B, Jiang L, Wang S M et al. Femtosecond laser drilling of micro-holes[J]. Chinese Journal of Lasers, 40, 0201001(2013).
[13] Gao J, Cao G Q. The application technology of special machining micro-hole[J]. Machinery Design & Manufacture, 169-171(2005).
[15] Wu X F, Yin H L, Li Q. Femtosecond laser processing of carbon nanotubes film[J]. Chinese Journal of Lasers, 46, 0902002(2019).
[16] Wang Z H, Wang B X, Kamano M et al. Fabrication of silicon micro/nanostructures based on laser interference ablation[J]. Laser & Optoelectronics Progress, 56, 163201(2019).
[44] Cui Y, Zhang H Y, Zhao Y A et al. Microstructure changes of gold film under femtosecond laser irradiation[J]. Chinese Journal of Lasers, 46, 0203001(2019).
[50] Zhou M, Liu L P, Dai Q X et al. Fabrication of micro-structures with two-photon absorption induced by femtosecond laser[J]. Chinese Journal of Lasers, 32, 1342-1346(2005).
[61] Chen L, Liu X D, Liu J et al. Microgroove etching with femtosecond laser on quartz glass surfaces[J]. Acta Optica Sinica, 40, 2314001(2020).
[62] Liang J G, Ni X C, Yang L et al. Numerical simulation of the ablation on copper with ultrashort laser pulses[J]. Chinese Journal of Lasers, 32, 1291-1294(2005).
[66] Hu D Z. Numerical calculation of the electron-phonon coupling relaxation time in pulse laser ablation[J]. Acta Physica Sinica, 58, 1077-1082(2009).
[88] Xin J T, Zhu W J, Liu C L. Molecular dynamics simulation of radiation effects in Al foil irradiated by femtosecond laser beams[J]. Explosion and Shock Waves, 24, 207-211(2004).
[92] Zhu S J, Wang X L, Zhu W H et al. Numerical simulation for influence of pulse duration on femtosecond laser ablation of alloy[J]. Electro-Optic Technology Application, 26, 39-44(2011).
[93] Liu X, Wang Y, Zhao L J. Molecular dynamics simulation on femtosecond laser ablation of metal[J]. Microfabrication Technology, 56-63(2004).
[97] Wang J L, Liu T Y, Zhang C H. Efficient local implicit contact algorithm for material point method[J]. Journal of Tsinghua University (Natural Science), 344-347(2008).
Get Citation
Copy Citation Text
Xuefeng Wu, Sanlin Mei. Research Progress in Femtosecond Laser Machining Mechanism and Simulation Analysis[J]. Laser & Optoelectronics Progress, 2021, 58(19): 1900005
Category: Reviews
Received: Oct. 14, 2020
Accepted: Dec. 27, 2020
Published Online: Sep. 29, 2021
The Author Email: Wu Xuefeng (wuxuefeng@hrbust.edu.cn)