Acta Physica Sinica, Volume. 69, Issue 16, 165201-1(2020)

Study of nano particle stripping and composition inspection on wafer surface

Li-Tuo Liu1,*... Chun-Long Wang2, Xiao-Ya Yu3, Jun-Kai Shi1, Yao Li1, Xiao-Mei Chen1 and Wei-Hu Zhou1 |Show fewer author(s)
Author Affiliations
  • 1Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100094, China
  • 2Liberation Army 32180, Beijing 100012, China
  • 3Key Laboratory of Experimental Physics and Computational Mathematics, Beijing 100094, China
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    Li-Tuo Liu, Chun-Long Wang, Xiao-Ya Yu, Jun-Kai Shi, Yao Li, Xiao-Mei Chen, Wei-Hu Zhou. Study of nano particle stripping and composition inspection on wafer surface[J]. Acta Physica Sinica, 2020, 69(16): 165201-1

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    Paper Information

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    Received: Apr. 8, 2020

    Accepted: --

    Published Online: Jan. 4, 2021

    The Author Email:

    DOI:10.7498/aps.69.20200517

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