Journal of Inorganic Materials, Volume. 34, Issue 8, 862(2019)

Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering Al+α-Al2O3 Target

Yi-Tian CHENG1...2, Wan-Qi QIU1,*, Ke-Song ZHOU1,2, Zhong-Wu LIU1, Dong-Ling JIAO1, Xi-Chun ZHONG1 and Hui ZHANG1 |Show fewer author(s)
Author Affiliations
  • 1School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China
  • 2The Key Lab of Guangdong for Modern Surface Engineering Technology, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou 510651, China
  • show less
    Figures & Tables(7)
    Schematic diagram of the experimental setup of Radio Frequency (RF) magnetron sputtering system
    GIXRD patterns of the films deposited at 550 ℃ from Al target and α-Al2O3 target
    GIXRD patterns of the film deposited at 550 ℃ from α-Al2O3 target and Al+α-Al2O3 composite target
    GIXRD pattern of the film deposited from Al+α-Al2O3 composite target at 500 ℃
    TEM micrographs of the films deposited at 500 ℃from (a) α-Al2O3 and (b) Al+α-Al2O3 composite targets
    (a) P-h curves and (b) Hardness of the alumina films deposited from different targets at 550 ℃
    • Table 1. The elementary compositions of the films deposited at 550 ℃ from various targets

      View table
      View in Article

      Table 1. The elementary compositions of the films deposited at 550 ℃ from various targets

      TargetCompositions of the films/at%
      AlOO/Al
      Al39.1460.861.56
      α-Al2O340.5759.431.47
      Al+α-Al2O338.2661.741.61
    Tools

    Get Citation

    Copy Citation Text

    Yi-Tian CHENG, Wan-Qi QIU, Ke-Song ZHOU, Zhong-Wu LIU, Dong-Ling JIAO, Xi-Chun ZHONG, Hui ZHANG. Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering Al+α-Al2O3 Target[J]. Journal of Inorganic Materials, 2019, 34(8): 862

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: RESEARCH PAPER

    Received: Oct. 10, 2018

    Accepted: --

    Published Online: Sep. 26, 2021

    The Author Email: Wan-Qi QIU (mewqqiu@scut.edu.cn)

    DOI:10.15541/jim20180473

    Topics