Opto-Electronic Engineering, Volume. 42, Issue 2, 84(2015)

Error Analysis of Ring Source Based on ZEMAX Interferometer Model

XU Yan*... WU Yongqian, LI Shifang, WAN Yongjian and HOU Xi |Show fewer author(s)
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    References(7)

    [1] [1] Kuechel M. Apparatus and method(s) for reducing the effect of coherent artifacts in an interferometer: U.S, 6804011 [P]. 2002-01-22.

    [2] [2] Deck LL, Stephenson D, Gratix E, et al. Apparatus and method(s) for reducing the effect of coherent artifacts in an interferometer: U.S, 6643024 [P]. 2001.

    [3] [3] Deck L L. Interferometric methods and systems using low coherence illumination: US, 6028670 [P]. 2000.

    [4] [4] Michael Kuchel. Spatial coherence in interferometry [EB/OL]. (2004). www.zygo.com.

    [5] [5] CAO Xiaojun, ZHU Jianqiang, LIN Qiang. Interference characteristic analysis on RoF illumination [J]. Proceeding of SPIE(S0277-786X), 2006, 6034: 60341Q-7.

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    XU Yan, WU Yongqian, LI Shifang, WAN Yongjian, HOU Xi. Error Analysis of Ring Source Based on ZEMAX Interferometer Model[J]. Opto-Electronic Engineering, 2015, 42(2): 84

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    Paper Information

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    Received: Aug. 22, 2014

    Accepted: --

    Published Online: Feb. 15, 2015

    The Author Email: Yan XU (kelly0498@163.com)

    DOI:10.3969/j.issn.1003-501x.2015.02.014

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