Laser & Optoelectronics Progress, Volume. 53, Issue 5, 51205(2016)
Analysis and Calibration of Defocus Detection System Based on Astigmatism Method
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Chen Li, Wang Junhua, Xu Min. Analysis and Calibration of Defocus Detection System Based on Astigmatism Method[J]. Laser & Optoelectronics Progress, 2016, 53(5): 51205
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Nov. 23, 2015
Accepted: --
Published Online: May. 5, 2016
The Author Email: Li Chen (14210720010@fudan.edu.cn)
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