[1] [1] CHEN T, LUO CH T, LIU H K, et al.. Development of multi-band linear variable filters ［J］.Opto-Electronic Engineering, 2007, 34(7): 72-75. (in Chinese)

[2] [2] EMADI A, WU H W, Ger de GRAAF, et al.. Design and implementation of a sub-nm resolution micro spectrometer based on a linear-variable optical filter ［J］.Optics Express, 2012, 20(1): 489-507.

[3] [3] EMADI A, WU H W, Ger de GRAAF, et al.. Linear variable optical filter-based ultraviolet microspectrometer ［J］.Applied Optics, 2012, 51(19): 4308-4315.

[4] [4] LAETITIA A T, FREDERIC L, MICHEAL L. Masking mechanisms applied to thin-film coatings for the manufacturing of linear variable filters for two-dimensional array detectors ［J］.Applied Optics, 2008, 47(30): 5706-5714.

[5] [5] EMADI A, WU H, GRAAF de G, et al.. IR Microspectrometers based on linear-variable optical filters ［J］.Procedia Engineering, 2011, 25: 1401-1404.

[6] [6] EMADO A, WU H, GRAAF de G, et al.. An UV linear variable optical filter-based micro-spetrometer ［J］.Procedia Engineering, 2010, 5: 416-419.

[7] [7] EMADI A, WU H, GRABARNIK S, et al.. Fabrication and characterization of IC-compatible linear varible optical filters with application in a micro-spectrometer ［J］.Sensors and Actuators A: Physical, 2010, 162: 400-405.

[8] [8] QIN J Y, LUO CH T, MA M J. Mask design for linear variable filters ［J］.Vacuum & Cryogenics, 2007, 13(1): 57-62. (in Chinese)

[9] [9] FAN B, LI G ZH, CHENG X B, et al.. Production and measurement of linear variable filter ［J］. Optical Instruments, 2006, 28(4): 95-103. (in Chinese)

[10] [10] TANG J F, GU P F, LIU X, et al.. Modern Optical Film Technology［M］. Zhejiang: Zhejiang University Press, 2006.(in Chinese)

[11] [11] ZHANG J SH, ZHANG J L, NING Y Q, et al.. Design and optimization of 1 555 nm broad-band pass filter film ［J］.Chinese Optics, 2013, 6(4): 557-562.(in Chinese)

[12] [12] LIU H S, WANG L SH, JIANG Y G, et al.. Adjustments of refractive index and stress of SiO2 films prepared by IBS technology ［J］. Opt. Precision Eng., 2013, 21(9): 2238-2243. (in Chinese)

[13] [13] ZHANG L CH, GAO J S. Developments of DUV coating technologies in CIOMP ［J］. Opt. Precision Eng., 2012, 20(11): 2395-2401.(in Chinese)

[14] [14] YANG D Q, FU X H, GENG S Y, et al.. Design and fabrication of 0.6—1.55 μm visible/near infrared ultra-broad band anti-reflection coatings ［J］.Chinese Optics, 2012, 5(3): 270-276. (in Chinese)

[15] [15] ZHANG L CH, GAO J S. Design of uniformity correction masks based on shadow matrix ［J］. Opt. Precision Eng., 2013, 21(11): 2757-2763. (in Chinese)