Infrared and Laser Engineering, Volume. 51, Issue 9, 20220497(2022)
Virtual-real combination interferometry for aspheric surface parameter error measurement with cat-eye-wavefront positioning (invited)
[1] Zijian Liang, Yongying Yang, Hongyang Zhao, et al. Advances in research and applications of optical aspheric surface metrology. Chinese Optics, 15, 161-186(2022).
[2] Baohua Chen, Quanying Wu, Yunhai Tang, et al. Processing method of large off-axis aspheric mirror. Optics and Precision Engineering, 29, 1095-1102(2021).
[3] [3] Malacara D. Optical Shop Testing[M]. 3rd ed. New Yk: WileyInterscience, 2006.
[4] Fengpu Wang, Xinnan Li, Chen Xu, et al. Optical testing path design for LOT aspheric segmented mirrors with reflective-diffractive compensation. Chinese Optics, 14, 1184-1193(2021).
[5] Meixuan Li, Li Wang, Lianhe Dong, et al. Application of aspheric technique in immersion lithography lighting system. Infrared and Laser Engineering, 46, 1118003(2017).
[6] Chao Zhang, Hui Xing, Junru Song, et al. Measurement of optical axis eccentricity of a large-aperture concave ellipsoid mirror. Infrared and Laser Engineering, 50, 20210196(2021).
[7] Xin Wang, Qiang Liu, Rong Shu. Application of Schmidt optical system with wide-field of view and fast focal ratio to aerospace imaging spectrometer. Optics and Precision Engineering, 27, 533-541(2019).
[8] Chenyang Lv, Renjun Zhan, Ying Cui. Collimating lens design and aspheric optimization method of laser cauterization gun. Infrared and Laser Engineering, 50, 20200219(2021).
[9] H Wang, Y Li, L Zeng, et al. A simple ray tracing method for measuring the vertex radius of curvature of an aspheric mirror. Optics Communications, 232, 61-68(2004).
[10] Y Yang, L Zhang, T Shi, et al. Determination of aspheric vertex radius of curvature in non-null interferometry. Applied Optics, 54, 2838-2844(2015).
[11] Y Pi, P J Reardon. Determining parent radius and conic of an off-axis segment interferometrically with a spherical reference wave. Optics Letters, 32, 1063-1065(2007).
[12] J Yang, L Qiu, W Zhao, et al. Laser differential confocal paraboloidal vertex radius measurement. Optics Letters, 39, 830-833(2014).
[13] R Díaz-Uribe, A Cornejo-Rodriguez. Conic constant and paraxial radius of curvature measurements for conic surfaces. Applied Optics, 25, 3731-3734(1986).
[14] Y Mejía, R Díaz-Uribe, A L Pacheco, et al. Measuring conic constant and vertex radius of fast convex conic surfaces from a set of Hartmann patterns. Optics Communications, 363, 166-175(2016).
[15] Xindong Chen, Ruigang Li. Research on geometric parameter measurement method using laser tracker in null lens asphere testing. Chinese Journal of Lasers, 42, 0508007(2015).
[16] L Xiong, E Qi, X Luo, et al. Stitching swing arm profilometer test for large aperture aspherics. Chinese Optics Letters, 17, 112201(2019).
[17] [17] Wang Z, Qu W, Asundi A. A simplified expression f aspheric surface fitting [J]. Optik, 2017, 140: 291298.
[18] Q Hao, T Li, Y Hu, et al. Vertex radius of curvature error measurement of aspheric surface based on slope asphericity in partial compensation interferometry. Optics Express, 25, 18107-18121(2017).
[19] [19] Hao Q, Li T, Hu Y. Partial compensation interferometry f measurement of surface parameter err of highder aspheric surfaces [C]2017 International Conference on Optical Instruments Technology: Optical Systems Modern Optoelectronic Instruments, 2018, 10616: 106160L.
[20] Q Hao, T Li, Y Hu, et al. Partial compensation interferometry measurement system for parameter errors of conicoid surface. Review of Scientific Instruments, 89, 063102(2018).
[21] Q Hao, X Tao, Y Hu, et al. Interferometric measurement of high-order aspheric surface parameter errors based on virtual-real combination iterative algorithm. Optics Express, 29, 27014-27030(2021).
[22] D Sha, S Quan, Q Zhu, et al. Research on optical aspherical surface’s fitting method. Acta Photonica Sinica, 24, 152-157(1995).
Get Citation
Copy Citation Text
Yao Hu, Xin Tao, Qun Hao. Virtual-real combination interferometry for aspheric surface parameter error measurement with cat-eye-wavefront positioning (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220497
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Jul. 20, 2022
Accepted: --
Published Online: Jan. 6, 2023
The Author Email: