Semiconductor Optoelectronics, Volume. 43, Issue 6, 1136(2022)

Study on Compensation Method of Light Spot Off-target Error of Position Sensitive Detector

LI Xin and MI Liang
Author Affiliations
  • [in Chinese]
  • show less
    References(11)

    [3] [3] Tomita M, Ibaraki S. Measurement of 2D positioning "error map" of a SCARA-type robot over the entire workspace by using a laser interferometer and a PSD sensor[C]// 2020 Inter. Symp. on Flexible Automation, 2020.

    [5] [5] Li Q, Xu S, Yu J, et al. An improved method for the position detection of a quadrant detector for free space optical communication[J]. Sensors, 2019, 19(1): 175-186.

    [6] [6] Wang X, Su X, Liu G, et al. Investigation of high-precision algorithm for the spot position detection for four-quadrant detector[J]. Optik-Inter. J. for Light and Electron Optics, 2019, 203(6): 163941.

    [7] [7] Qiu Z B, Jia W H, Ma X, et al. Neural-network-based method for improving measurement accuracy of four-quadrant detectors[J]. Appl. Opt., 2022, 61: 9-14.

    [9] [9] David R N, José L G, Ignacio B M, et al. Mathematical model and calibration procedure of a PSD sensor used in local positioning systems[J]. Sensors, 2016, 16(9): 1484.

    [10] [10] Fan Z A, Jin L A, Hy B, et al. Attitude measurement and simulation of two-dimensional position sensitive detector[J]. Optik, 2019, 184: 399-411.

    [13] [13] Zhang J, Yang J, Liu Z, et al. A model of measurement error caused by non-uniform spot on four-quadrant detector[C]// Infrared Sensors, Devices, and Applications Ⅷ, 2018.

    [14] [14] Zhang J, Qian W, Gu G, et al. Improved algorithm for expanding the measurement linear range of a four-quadrant detector[J]. Appl. Opt., 2019, 58(28): 7741.

    [15] [15] Podlaskin B G, Guk E G, Obolenskov A G, et al. Improvement of the accuracy of a position-sensitive detector with a wide field of view[J]. Technical Phys. Lett., 2020, 46(10): 988-990.

    [16] [16] Qian L, Wu J, Chen Y, et al. High precision position measurement method for laguerre-gaussian beams using a quadrant detector[J]. Sensors, 2018, 18(11): 4007.

    Tools

    Get Citation

    Copy Citation Text

    LI Xin, MI Liang. Study on Compensation Method of Light Spot Off-target Error of Position Sensitive Detector[J]. Semiconductor Optoelectronics, 2022, 43(6): 1136

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 19, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022071902

    Topics