Semiconductor Optoelectronics, Volume. 43, Issue 6, 1136(2022)
Study on Compensation Method of Light Spot Off-target Error of Position Sensitive Detector
In order to extend the detection range of position sensitive detector, and solve the problem that the light spot cannot be accurately positioned when the light spot is off-target on the PSD photosensitive surface, a light spot off-target error compensation method is proposed. The variation law of the spot energy center of PSD detection before and after the off-target was analyzed, and the functional relationship between the PSD light intensity signal and the position detection error was established. The experimental results show that: when the size of the PSD photosensitive surface is 12mm×12mm, for a Gaussian light spot with a radius of 5mm, the X-axis detection range of the PSD photosensitive surface is increased by 66.7% after compensation by the spot compensation method proposed in this paper, and the average relative error of position detection is no more than 5%. This method is important to improve the performance of PSD position detection.
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LI Xin, MI Liang. Study on Compensation Method of Light Spot Off-target Error of Position Sensitive Detector[J]. Semiconductor Optoelectronics, 2022, 43(6): 1136
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Received: Jul. 19, 2022
Accepted: --
Published Online: Jan. 27, 2023
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