Semiconductor Optoelectronics, Volume. 43, Issue 6, 1136(2022)

Study on Compensation Method of Light Spot Off-target Error of Position Sensitive Detector

LI Xin and MI Liang
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  • [in Chinese]
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    In order to extend the detection range of position sensitive detector, and solve the problem that the light spot cannot be accurately positioned when the light spot is off-target on the PSD photosensitive surface, a light spot off-target error compensation method is proposed. The variation law of the spot energy center of PSD detection before and after the off-target was analyzed, and the functional relationship between the PSD light intensity signal and the position detection error was established. The experimental results show that: when the size of the PSD photosensitive surface is 12mm×12mm, for a Gaussian light spot with a radius of 5mm, the X-axis detection range of the PSD photosensitive surface is increased by 66.7% after compensation by the spot compensation method proposed in this paper, and the average relative error of position detection is no more than 5%. This method is important to improve the performance of PSD position detection.

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    LI Xin, MI Liang. Study on Compensation Method of Light Spot Off-target Error of Position Sensitive Detector[J]. Semiconductor Optoelectronics, 2022, 43(6): 1136

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    Paper Information

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    Received: Jul. 19, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2022071902

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