Fig. 1. Three dimensional distribution of actuator influence function

Fig. 2. [in Chinese]

Fig. 3. Structure diagram of the continuous mirror DM of the separation actuator

Fig. 4. Splicer DM

Fig. 5. Structure diagram and deformation principle diagram of thin film DM

Fig. 6. Schematic diagram of the cross-section of the dual piezomorphic mirror

Fig. 7. The structure of the MEMS discrete surface DM

Fig. 8. Structure diagram of the voice coil DM^[24]