Chinese Optics Letters, Volume. 18, Issue 1, 013101(2020)

Controllable annulus micro-/nanostructures on copper fabricated by femtosecond laser with spatial doughnut distribution

Biwei Wu, Cong Wang*, Zhi Luo**, Junhui Li, Shu Man, Kaiwen Ding, and Ji’an Duan
Author Affiliations
  • State Key Laboratory of High Performance and Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
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    Figures & Tables(7)
    Shaping optical path of the (a) traditional Bessel annular beam and (b) improved doughnut beam.
    Schematic diagram for the evolution of the improved doughnut beam.
    Experimental setup of doughnut shaping. M1, M2, mirror; L1, L2, L3, L4, L5, L6, lens; HWP, half-wave plate; D, dichroscope; SP, splitter.
    Calculated annular beam with different diameters at different axial positions in the upper and middle panels, while the fabricated rings corresponding to the simulation positions are in the lower panels.
    Relationship between the movement and diameter of the fabricated rings. The red line is the simulated fitting line.
    SEM images of the rings fabricated by different linearly polarized fs laser improved doughnut beams. (I) The experimental results obtained without adding half-wave plates. The red arrows in the figure represent the initial polarization direction of the laser. (II) The experimental results obtained after adding half-wave plates. The blue dotted arrow represents the fast axis direction of half-wave plates, the red arrow is the initial polarization direction of laser as shown in (I), and the orange arrow is the polarization direction of the linearly polarized laser after passing through the half-wave plates. γ represents the included angle between the vibration direction of the original polarized laser and the fast axis of the half-wave plates, and γ2 represents the included angle between the vibration direction of the original polarized light and the vibration direction of the polarized light after passing through the polarizer.
    • Table 1. Measured and Calculated Diameters and Errors at Different Positions Corresponding to the Movement

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      Table 1. Measured and Calculated Diameters and Errors at Different Positions Corresponding to the Movement

      Movement Amount (μm)Experimental Diameter (μm)Simulated Diameter (μm)Error (%)
      04394392.278
      1004214261.663
      2004074070.737
      3003943920.810
      4003723741.613
      5003573590.840
      6003413400.880
      7003263261.840
      8003083093.247
      9002942931.361
      10002802761.071
      11002602601.154
      12002402432.083
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    Biwei Wu, Cong Wang, Zhi Luo, Junhui Li, Shu Man, Kaiwen Ding, Ji’an Duan. Controllable annulus micro-/nanostructures on copper fabricated by femtosecond laser with spatial doughnut distribution[J]. Chinese Optics Letters, 2020, 18(1): 013101

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    Paper Information

    Category: Thin Films and Optics at Surfaces

    Received: Aug. 3, 2019

    Accepted: Sep. 25, 2019

    Posted: Oct. 23, 2019

    Published Online: Dec. 12, 2019

    The Author Email: Cong Wang (wangcong@csu.edu.cn), Zhi Luo (luozhi@csu.edu.cn)

    DOI:10.3788/COL202018.013101

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