Infrared and Laser Engineering, Volume. 48, Issue 12, 1215002(2019)
Low damage processing of titanium gemstone crystal based on chemical mechanical polishing
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Jin Shouping, Tong Hongwei, Zhang Yuhui, Fu Yuegang. Low damage processing of titanium gemstone crystal based on chemical mechanical polishing[J]. Infrared and Laser Engineering, 2019, 48(12): 1215002
Received: Sep. 5, 2019
Accepted: Oct. 15, 2019
Published Online: Feb. 11, 2020
The Author Email: Shouping Jin (jinsp@mail.nosta.gov.cn)