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Journal of Inorganic Materials, Volume. 38, Issue 8, 987(2023)

Piezoelectric High Temperature Liquid Droplet Spraying Component

Kai ZOU1...2, Wenbin ZHANG2, Sheng GUAN2, Haiyi SUN3, Kailun PENG3, Jiajie ZOU3, Xuehong LI3, Cheng WANG3, Yuxin LENG3, Ruihong LIANG2 and Zhiyong ZHOU2,* |Show fewer author(s)
Author Affiliations
  • 11. University of Chinese Academy of Sciences, Beijing 100049, China
  • 22. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China
  • 33. Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    References(8)

    [1] C WAGNER, N HARNED. Lithography gets extreme. Nat. Photonics, 24(2010).

    [2] M M BASKO, M S KRIVOKORYTOV et al. Fragmentation dynamics of liquid-metal droplets under ultra-short laser pulses. Laser Phys. Lett.(2017).

    [3] G D HUTCHESON. Moore’s law, lithography, and how optics drive the semiconductor industry. Proceedings of SPIE(2018).

    [6] D B ABRAMENKO, P S ANTSIFEROV, D I ASTAKHOV et al. Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection. Uspekhi Fiz. Nauk, 323(2019).

    [7] D K YANG, D WANG, Q S HUANG et al. The development of laser- produced plasma EUV light source. Chip(2022).

    [8] L HU, L SHE, Y FANG et al. Deformation characteristics of droplet generated by Rayleigh jet breakup. AIP Adv.(2021).

    [9] N MOALLEMI, R LI, K MEHRAVARAN. Breakup of capillary jets with different disturbances. Phys. Fluids(2016).

    [10] B ROLLINGER, R S ABHARI. Excitation and dynamics of liquid tin micrometer droplet generation. Phys. Fluids(2016).

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    Kai ZOU, Wenbin ZHANG, Sheng GUAN, Haiyi SUN, Kailun PENG, Jiajie ZOU, Xuehong LI, Cheng WANG, Yuxin LENG, Ruihong LIANG, Zhiyong ZHOU. Piezoelectric High Temperature Liquid Droplet Spraying Component[J]. Journal of Inorganic Materials, 2023, 38(8): 987

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    Paper Information

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    Received: Mar. 16, 2023

    Accepted: --

    Published Online: Dec. 28, 2023

    The Author Email: ZHOU Zhiyong (zyzhou@mail.sic.ac.cn)

    DOI:10.15541/jim20231001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology