Acta Photonica Sinica, Volume. 50, Issue 11, 1112001(2021)
Fiber-coupled Chromatic Confocal 3D Measurement System and Comparative Study of Spectral Data Processing Algorithms
Figures & Tables(25)
Fig. 6. Optical path of chromatic confocal axial calibration experiment
Fig. 11. Spectral data and peak extraction results of different algorithms
Fig. 12. Relative deviation of each position under different peak wavelength extraction algorithms（2 μm step）
Fig. 13. Axial resolution test results by fitting calibration method
Fig. 14. Axial resolution test results by interpolation calibration method
Table 1. Main component parameters
View tableView in ArticleTable 1. Main component parameters
Component Parameter Light source Wave band：400~800 nm Fiber coupler Diameter：50 μm multimode fiber，NA=0.22，50∶50 split ratio，Wave band：400~900 nm Spectrometer Resolution：0.7 nm，Wave band：200~1 100 nm
Table 2. Parameters of chromatic lens group
View tableView in ArticleTable 2. Parameters of chromatic lens group
Lens surface Surface type Curvature radius/mm Thickness/mm Optical glass Semiaperture/mm OBJ Standard surface ∞ 44.120 - 0.000 1 Even-order aspheric surface 63.000 0.060 1.52，52.0 12.500 2 Standard surface 66.000 2.500 S⁃TIH13 12.500 3 Standard surface 31.000 9.000 S⁃FSL5 12.500 4 Standard surface -28.500 40.000 - 12.500 5 Even-order aspheric surface 20.130 9.857 N-SF6 12.500 6 Standard surface ∞ 18.979 - 12.500 IMA Standard surface ∞ - - 0.569
Table 3. Goodness of polynomial fitting with different orders
View tableView in ArticleTable 3. Goodness of polynomial fitting with different orders
Polynomial order 1 2 3 4 5 6 7 8 R⁃square 0.977 8 0.999 5 1 1 1 1 1 1 RMSE 47.95 7.46 2.107 1.682 1.366 0.876 0.673 0.672
Table 4. Displacement measurement results by fitting calibration method
View tableView in ArticleTable 4. Displacement measurement results by fitting calibration method
Position 1 2 3 4 5 6 7 8 9 10 11 Test data /μm 0 100.027 8 200.037 3 300.171 6 400.267 4 499.745 4 601.105 2 700.098 5 799.445 0 900.584 5 1001.144 0 True data /μm 0 100.25 200.39 300.76 400.63 500.21 600.88 700.17 800.71 900.71 1 000.22 Deviation /μm 0 -0.222 2 -0.352 7 -0.588 5 -0.362 6 -0.464 6 0.225 2 -0.071 5 -1.265 0 -0.125 5 0.005 2 Relative deviation/% 0 0.395 4 0.334 7 0.087 2 0.012 7 0.027 9 0.044 5 0.046 6 0.059 4 0.077 0 0.924 1
Table 5. Displacement measurement results by interpolation calibration method
View tableView in ArticleTable 5. Displacement measurement results by interpolation calibration method
Position 1 2 3 4 5 6 7 8 9 10 11 Test data /μm 0 99.608 3 200.291 0 300.385 4 400.284 5 500.140 3 600.295 6 700.400 0 800.758 0 900.666 5 999.619 2 True data /μm 0 100.25 200.39 300.76 400.63 500.21 600.88 700.17 800.71 900.71 1 000.22 Deviation /μm 0 -0.641 7 -0.099 0 -0.374 6 -0.345 6 -0.069 8 -0.584 5 0.230 0 0.048 0 -0.043 5 -0.600 8 Relative
deviation/%
0 0.640 1 0.049 4 0.124 6 0.086 3 0.013 9 0.097 3 0.032 9 0.006 0 0.004 8 0.060 1
Table 6. Measurement result of quartz glass thickness
View tableView in ArticleTable 6. Measurement result of quartz glass thickness
No. 1 2 3 4 5 6 7 8 9 10 Average h/mm 0.145 0.144 0.148 0.144 0.144 0.144 0.146 0.148 0.146 0.143 0.145 H/mm 0.217 0.216 0.222 0.216 0.216 0.216 0.219 0.222 0.219 0.215 0.218 Deviation/% 0.91 1.37 1.37 1.37 1.37 1.37 0 1.37 0 1.83 0.5
Tools
Get Citation
Copy Citation Text
Jiayi WANG, Tao LIU, Xiaofeng TANG, Jiaqi HU, Xing WANG, Guoqing LI, Tao HE, Shuming YANG. Fiber-coupled Chromatic Confocal 3D Measurement System and Comparative Study of Spectral Data Processing Algorithms[J]. Acta Photonica Sinica, 2021, 50(11): 1112001
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: May. 11, 2021
Accepted: Aug. 16, 2021
Published Online: Dec. 2, 2021
The Author Email: LIU Tao (liu8483@xjtu.edu.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20