Acta Optica Sinica, Volume. 24, Issue 3, 423(2004)
Deflecting System and Moving Objective Lens in Electron Beam Exposure Machine
References(2)
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[in Chinese], [in Chinese]. Deflecting System and Moving Objective Lens in Electron Beam Exposure Machine[J]. Acta Optica Sinica, 2004, 24(3): 423
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