Laser & Optoelectronics Progress, Volume. 61, Issue 19, 1900001(2024)
China
Fig. 1. Continuous wave (CW) laser fabrication of 3D inorganic micro and nanostructures. (a) 473 nm CW laser writes patterning information in glass [3]; (b) photograph of 105 layers glass structure processed by CO2 laser (left), optical microscope image of sidewall section (right) [39]; (c) glass microlens array processed by CO2 laser, the image on the right is the image effect of a single microlen[40]; (d) 3D transparent glass microstructures processed by 442 nm CW laser[41]; (e) unsupported ceramic microstructures fabricated by 980 nm CW laser [42]
Fig. 2. Picosecond laser fabricating 3D inorganic micro and nanostructures. (a) Picosecond laser welding ceramic components[44]; (b) end face of damaged channel[46]; (c) picosecond laser embedded 3D structure in transparent glass[47]; (d) 3D microstructure of glass fabricated by picosecond laser fabricating HSQ[51]
Fig. 3. Femtosecond laser fabrication of 3D inorganic micro and nanostructures in glass. (a) Permanent trace in glass[54]; (b) femtosecond laser writes low loss curved waveguide in glass[56]; (c) patterning of femtosecond laser inside Au doped glass[62]; (d) femtosecond laser writing of depth information in glass[64]; (e) CsPbBr3 nanocrystalline structures prepared by femtosecond laser[65]; (f) femtosecond laser writing 3D inorganic microstructure based on HSQ[69]
Fig. 4. Femtosecond laser fabricating 3D inorganic micro and nanostructures in optical crystal. (a) End view of concave cladding waveguide written in YAG∶Nd3+ [70]; (b) waveguide end face written in LiNbO3 crystal[74]; (c) cross section of waveguide in ZnS crystal[71]; (d) double line (No.1) and concave cladding (No.2) waveguides generated in LBO crystal[73]; (e) nanoscale regulation of femtosecond laser in LiNbO3 crystal[78]; (f) femtosecond laser writes holograms of specific patterns in LiNbO3 crystal[80]
Fig. 5. Femtosecond laser fabrication of 3D inorganic micro and nanostructures based on ceramics and quantum dots. (a) Femtosecond laser-induced chemical bonding of quantum dots to form 3D inorganic micro and nanostructures[32]; (b) femtosecond laser printing of mixed quantum dots to form a 3D nanopillar array[81]; (c) femtosecond laser fabricating circular waveguides in ceramics with spiral motion[84]
Fig. 6. Femtosecond laser fabricating of 3D inorganic micro and nanostructures in precursor photoresist containing inorganic components. (a) Self supporting aspheric microlens [85]; (b) tetrahedral cell [86]; (c) free form sculpture [87]; (d) micron cross torsion structure [88]; (e) drying shrinkage process causes 3D structural cracks [89]; (f) porous microchannel structure [90]; (g) microlens printed on support column [91]; (h) 150 μm-high diffractive micro objective lens[33]
Fig. 8. 3D inorganic micro and nanostructures prepared by the polymer template assisted femtosecond laser fabrication method. (a) Alumina octahedral truss nanolattice[97]; (b) microstructure of DNA double helix hollow glass[10]; (c) 3D silicon nanostructure[98]; (d) double-well ceramic nanolattice[99]; (e) 3D hollow spiral microtubule structure[100]
Fig. 10. Laser fabrication of 3D inorganic micro and nanostructures for quantum chips. (a) Femtosecond laser patterns resistors[102]; (b) femtosecond laser directly writing optical waveguide (left) and waveguide directional coupler (right)inside the glass[104]; (c) femtosecond laser direct writing 3D waveguide array (top left), photonic lattice section (bottom left), schematic diagram of coupling one waveguide to other waveguides in a 3D waveguide array (upper right), and evolution pattern of single photon output after quantum walk in the lattice (lower right)[106]; (d) 3D layout of three qubit Toffoli gate encoded by femtosecond laser direct writing path[107]
Fig. 11. Application of laser fabricated 3D inorganic micro and nanostructures. (a) Femtosecond laser erasure/recovery[66]; (b) QR code encryption demonstration[67]; (c) patterning of Cl-Br-—I- codoped glass[65]; (d) side view of laser welding[112]; (e) assembly drawing of successful laser welding[44]; (f) vertical waveguide in the sensor[7]; (g) microstructure of storage bin[115]; (h) fabrication of fused quartz by circularly polarized laser pulses[117]; (i) effect comparison between bare quartz glass and quartz glass with anti-reflective structure[118]; (j) truncated cone array [119]
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Jianmiao Zhang, Feng Jin, Xianzi Dong, Meiling Zheng. China
Category: Reviews
Received: Oct. 10, 2023
Accepted: Dec. 11, 2023
Published Online: Apr. 3, 2024
The Author Email: Jin Feng (jinfeng@mail.ipc.ac.cn), Zheng Meiling (zhengmeiling@mail.ipc.ac.cn)