Fig. 1. Maximum reflectivity of ideal multilayers working at 8-12 nm wavelengths under near normal incidence

Fig. 2. Grazing incidence reflectivity results of Pd/Y multilayers at 8 keV

Fig. 3. Near-normal incidence reflectivity results measured at 8-10 nm wavelengths of Pd/Y multilayers

Fig. 4. Measured S-polarized reflectivity and fitted results of soft X-ray Cr/C multilayer polarizer

Fig. 5. Near-normal incidence reflectivity and fitted results of ultrathin Cr/C multilayers with large number of bilayers

Fig. 6. Cross-section TEM and electron diffraction measurement results

Fig. 7. Reflectivity measurement and simulation results in the water window region of Cr/C multilayers with no barrier layers and with B₄C barrier layers

Fig. 8. Tender X-ray reflectivity measurement results of Cr/C multilayer

Fig. 9. X-ray reflectivity measurement and fitted results of Ru/C multilayers with different thickness

Fig. 10. Stress measurements results of Ru/B₄C multilayers fabricated by different ratio of nitrogen

Fig. 11. X-ray reflectivity measurement and fitted results of Pd/B₄C multilayers fabricated by Kr and Ar sputtering

Fig. 12. Review of experimental and theoretical peak reflectivity of multilayers working at different X-ray range， developed in IPOE （AOI： Angle of Incidence）

Fig. 13. Reflectance design results of broadband Pd/B₄C multilayers with different bandwidths

Fig. 14. Results of W/Si periodic multilayer and broadband multilayer

Fig. 15. Measured d-spacing uniformity and reflectivity at different positions of W/Si multilayer mirror

Fig. 16. d-spacing uniformity of W/Si and Ru/C multilayers

Fig. 17. Pictures of double channel multilayer mirrors

Fig. 18. Schematic of multilayer coated blazed grating

Fig. 19. TEM images of Cr/C multilayer blazed grating with 2 400 l/mm line density

Fig. 20. Measured and simulation results of diffraction efficiency and reflectivity of Cr/C multilayer blazed grating and Au coated grating