Optics and Precision Engineering, Volume. 30, Issue 21, 2793(2022)

Development of high performance and large size X-ray multilayer reflective optics

Qiushi HUANG, Runze QI, Zhe ZHANG, Wenbin LI, Li JIANG, Yunxue ZHANG, Yeqi ZHUANG, Zhong ZHANG, and Zhanshan WANG*
Author Affiliations
  • Institute of Precision Optical Engineering, MOE Key Laboratory of Advanced Micro-Structured Materials, School of Physics Science and Engineering, Tongji University, Shanghai200092, China
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    X-ray multilayers are key optical elements in synchrotron radiation and free electron laser facilities, astronomical observations, plasma diagnostics, and lab-based analytical instruments. They can realize highly efficient reflection, monochromatization, and polarization of X-rays. Our group has been conducting systematic studies on the design, fabrication, and characterization of X-ray multilayers during the past 20 years. We have developed a series of high-performance multilayers with world-class level reflectivity at different wavelengths and have built the deposition platform for large size X-ray multilayers based on the magnetron sputtering technique. The largest deposition mirror could achieve a length of 1.2 m. The fabricated, hard X-ray multilayer mirrors have been successfully applied in synchrotron radiation facilities both in China and abroad. Through the combination of multilayer and reflective gratings, innovative, ultrahigh efficiency, tender, X-ray multilayer grating optics have been developed. Compared with conventional single-layer gratings, a maximum efficiency improvement of 40 times could be achieved. This study will introduce the results and progress that were achieved by our group in X-ray multilayer elements.

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    Qiushi HUANG, Runze QI, Zhe ZHANG, Wenbin LI, Li JIANG, Yunxue ZHANG, Yeqi ZHUANG, Zhong ZHANG, Zhanshan WANG. Development of high performance and large size X-ray multilayer reflective optics[J]. Optics and Precision Engineering, 2022, 30(21): 2793

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    Paper Information

    Received: Jul. 16, 2022

    Accepted: --

    Published Online: Nov. 28, 2022

    The Author Email: WANG Zhanshan (wangzs@tongji.edu.cn)

    DOI:10.37188/OPE.20223021.2793

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