Optoelectronics Letters, Volume. 16, Issue 5, 369(2020)

Structural and plasma characterization of the power effect on the chromium thin film deposited by DC magnetron sputtering

Salo S. Alsheikh*... Abdallah B., Akel M. and Kakhia M. |Show fewer author(s)
Author Affiliations
  • Department of Physics, Atomic Energy Commission, Damascus P.O. Box 6091, Syria
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    The chromium (Cr) films on silicon Si(100) substrate are prepared using DC magnetron sputtering technique at an argon gas pressure of 3 Torr for different applied powers (40—140 W). The chemical composition, the thicknesses and the structural characterization of the deposited Cr films are studied and analyzed using energy dispersive X-ray spectroscopy (EDX), scanning electron microscopy (SEM), and X-ray diffraction (XRD), respectively. Furthermore, the generated plasma parameters, including floating potential, plasma potential, electron density, ion density and electron temperature, have been measured, and the automated Langmuir probe is used for the Cr films deposition. The ion and metal fluxes are also determined. The results show that the Cr film thickness enhances with the higher applied power. The Cr deposited films properties are characterized and correlated with the measured plasma parameters.

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    S. Alsheikh Salo, B. Abdallah, M. Akel, M. Kakhia. Structural and plasma characterization of the power effect on the chromium thin film deposited by DC magnetron sputtering[J]. Optoelectronics Letters, 2020, 16(5): 369

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    Paper Information

    Received: Sep. 26, 2019

    Accepted: Nov. 6, 2019

    Published Online: Dec. 25, 2020

    The Author Email: Salo S. Alsheikh (pscientific26@aec.org.sy)

    DOI:10.1007/s11801-020-9158-2

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