Laser & Optoelectronics Progress, Volume. 54, Issue 6, 61202(2017)
Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler
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Ma Long, Lü Yi, Pei Xin, Jiao Zhichao, Zhang Hongyan, Hu Yanmin. Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler[J]. Laser & Optoelectronics Progress, 2017, 54(6): 61202
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Dec. 30, 2016
Accepted: --
Published Online: Jun. 8, 2017
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