Laser & Optoelectronics Progress, Volume. 54, Issue 6, 61202(2017)
Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler
In order to improve the measurement efficiency of white light interferometric profilers, one new adaptive planning method of spatial scanning range is proposed. The corresponding measurement system is built and the energy gradient function is chosen to locate the optimal interference position. The interference fringes of charge coupled device (CCD) images at the optimal interference positions are extracted with the ViBe algorithm, and then the extraction results are processed by the binaryzation. The experimental results show that the proposed method can accurately identify the positions of the function upper and lower limits.
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Ma Long, Lü Yi, Pei Xin, Jiao Zhichao, Zhang Hongyan, Hu Yanmin. Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler[J]. Laser & Optoelectronics Progress, 2017, 54(6): 61202
Category: Instrumentation, Measurement and Metrology
Received: Dec. 30, 2016
Accepted: --
Published Online: Jun. 8, 2017
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