Fig. 1. Schematic diagram of thin film silicon solar cell with composite rough AZO grating

Fig. 2. Short circuit current J_sc varied with front AZO gratings rough h_ave and l_cor

Fig. 3. Short-circuit current J_sc varied with AZO front grating rough h_ave (0.05~0.80) and l_cor

Fig. 4. Short circuit current J_sc varied with rough AZO back grating h_ave(0.05~0.80) and l_cor

Fig. 5. AZO film and AFM surface morphologies and cross-sectional curves of AZO grating

Fig. 6. Reflection spectrum of AZO gratings with rough surface and no rough surface fabricated by experiment

Fig. 7. Schematic diagram of numerical simulation AZO grating with rough surface and no rough surface

Fig. 8. Reflection spectra of AZO gratings with rough surface or non-rough surface calculated by simulation