Opto-Electronic Engineering, Volume. 33, Issue 1, 127(2006)

Adaptive controller based on LMS algorithm for compensating environmental vibration of a phase-shifting interferometer

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    References(5)

    [1] [1] WU Dong,ZHU Ri-hong,CHEN Lei.Transverse spatial phase-shifting method used in vibration-compensated interferometer[J].Optik,2004,115(8):343-346.

    [2] [2] WYANT J.C.Advances in interferometric metrology[J].Proc.SPIE,2002,4927:154-162.

    [3] [3] YAMAGUCHI I,LIU J Y,KATO J.Active phase-shifting interferometers for shape and deformation measurements[J].Opt.Eng,1996,35(10):2930-2937.

    [5] [5] TMS 320 C54x User's Guide[Z].Texas Instruments Inc.1999.

    [6] [6] Analog Devices,Inc.,AD8302:LF-2.7GHz RF/IF Gain and Phase Detector Data sheet[EB/OL].http://www.analog.com,2002-07-01 /2002-11-04.

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    [in Chinese], [in Chinese], [in Chinese]. Adaptive controller based on LMS algorithm for compensating environmental vibration of a phase-shifting interferometer[J]. Opto-Electronic Engineering, 2006, 33(1): 127

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    Paper Information

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    Received: Mar. 29, 2005

    Accepted: --

    Published Online: Nov. 14, 2007

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