Acta Optica Sinica, Volume. 34, Issue 12, 1212003(2014)
Two-Flat Test Solution Based on Iterative Algorithm
A method for reconstruction surfaces map on iterative algorithm is presented. According to flipping and rotationg one of the two plates, four measurements are generated. The formulas are directly derived from four measurements that require rotation or flipping operations. Three trial surfaces are initialized, then the new surfaces are calculated according to the formulas. The trial surfaces are replaced by the new surfaces. The experiment shows that this method can achieve a deviation of 0.1 nm, which only requires no more than 50 iterations.And the error sources are analyzed in detail. The total measuring error of this method is 1.417 nm.
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Gao Bo, Li Qiang, Liu Ang, He Yuhang, Chai Liqun. Two-Flat Test Solution Based on Iterative Algorithm[J]. Acta Optica Sinica, 2014, 34(12): 1212003
Category: Instrumentation, Measurement and Metrology
Received: Jun. 23, 2014
Accepted: --
Published Online: Oct. 30, 2014
The Author Email: Bo Gao (cowboy12319@sina.com)