Fig. 1. Flow chart of optic-mechanical reference positioning method

Fig. 2. Schematic diagram of testing optical path of optic-mechanical reference

Fig. 3. Schematic diagram of SMR target ball measurement

Fig. 4. SMR target object and schematic diagram

Fig. 5. Schematic diagram of axial measurement

Fig. 6. Schematic diagram of clocking error measurement

Fig. 7. Schematic of CGH reference area

Fig. 8. Simulation optical path of different posture measurement methods

Fig. 9. Simulation of axial position of SMR target ball

Fig. 10. Simulation of lateral position of SMR target ball

Fig. 11. Axial position simulation of cat eye and reference ball methods

Fig. 12. Lateral position simulation of reference ball method

Fig. 13. Theoretical simulation fitting curves

Fig. 14. CGH layout design schematic

Fig. 15. Optical path of CGH compensation detection

Fig. 16. Optical path of interference compensation testing

Fig. 17. SMR target ball testing results

Fig. 18. Test results of cat eye and reference ball methods

Fig. 19. Residual distribution