Chinese Optics Letters, Volume. 11, Issue 11, 112302(2013)

A two-dimensional high-frequency electrostatic microscanner

Yaobo Liu, Weizheng Yuan, Dayong Qiao, Meng Wu, Xuan Yang, and Bin Lian
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Yaobo Liu, Weizheng Yuan, Dayong Qiao, Meng Wu, Xuan Yang, Bin Lian. A two-dimensional high-frequency electrostatic microscanner[J]. Chinese Optics Letters, 2013, 11(11): 112302

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Paper Information

Category: Optical divces

Received: Aug. 22, 2013

Accepted: Oct. 17, 2013

Published Online: Nov. 25, 2013

The Author Email:

DOI:10.3788/col201311.112302

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