[1] [1] TYSON R K. Introduction to Adaptive Optics［M］. Bellingham: SPIE Press, 2000.

[2] [2] WANG Y K, HU L F, WANG CH CH, et al.. Modeling and control of tip/tilt mirror in liquid crystal adaptive optical system［J］. Opt. Precision Eng., 2016, 24(4): 771-779.(in Chinese)

[3] [3] DING K, HUANG Y M, MA J G, et al.. Composite control of fast-steering-mirror for beam jitter［J］.Opt. Precision Eng., 2011, 19(9): 1991-1998. (in Chinese)

[4] [4] MA J, TANG T. Review of compound axis servomechanism tracking control technology［J］. Infrared and Laser Engineering, 2013, 42(1): 218-227. (in Chinese)

[5] [5] XU X H, L T X, SHI K, et al.. Device for improving pointing precision of fast steering mirror with spherical gemel［J］. Opt. Precision Eng., 2015, 23(6): 1688-1694. (in Chinese)

[6] [6] LI X T, ZHANG X P, MAO D P, et al.. Adaptive robust control over high-performance VCM-FSM［J］. Opt. Precision Eng., 2017, 25(9): 2428-2436. (in Chinese)

[7] [7] WANG SH, CAO Y Y. Design of control system for fast steering mirror driven by voice coil actuator［J］.Journal of Electronic Measurement and Instrument, 2017, 31(7): 1115-1121.(in Chinese)

[8] [8] JIA J L, ZHAO J Y, WANG J L, et al.. Adaptive optical wave-front processing algorithm based on FPGA［J］. Opt. Precision Eng., 2017, 25(10): 2580-2583. (in Chinese)

[9] [9] LI X H. Research of Micro Displacement Measurement Technology Based on Capacitance Method［D］.Dalian: Dalian Maritime University, 2015.(in Chinese)

[10] [10] ZHENG Y T. Design of Parallel-Plate Capacitor Based Mirco-Displacement Detecting System［D］.Dalian: Dalian University of Technology, 2010.(in Chinese)

[11] [11] FENG J.Research on the Detecting Technology of Tiny Capacitance［D］. BeiJing: University of Chinese Academy of Sciences, 2014.(in Chinese)

[12] [12] ZHANG Y P, XU Y L, WANG Y T.Measurement method of high-precision capacitive angular displacement sensor［J］.Chinese Journal of Scientific Instrument, 2014, 35(S1): 147-150. (in Chinese)

[13] [13] ZHU X B, YUAN W ZH, REN S. Universal digital detection interface for capacitive sensors［J］.Foreign Electronic Measurement Technology, 2013, 32(1): 62-65. (in Chinese)

[14] [14] AMARASINGHE R., DAO D V, TORIYAM T. Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements［J］.Sensors and Actuators, 2007(134): 310-320.

[15] [15] ZHANG D F, DRISSEN W, BREGUET J M, et al.. A high-sensitivity and quasi-linear capacitive sensor for nano-mechanical testing applications［J］.Journal of Micromechanics and Microengineering, 2009, 19(7): 075003.