Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Laser & Optoelectronics Progress, Volume. 51, Issue 2, 21201(2014)

Research on Diffraction-Based Overlay Measurement Using Two-Dimensional Periodic Structure

Peng Bofang1,2、*, Lu Hailiang2, Wang Fan2, Xu Qixin1,2, and Hou Wenmei1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (14)
    Cited By (1)
    Tools
    Paper Information
    Topics
    Cited By

    Article index updated:May. 20, 2024

    Citation counts are provided from Researching.
    The article is cited by 1 article(s) from Researching.
    Tools

    Get Citation

    Copy Citation Text

    Peng Bofang, Lu Hailiang, Wang Fan, Xu Qixin, Hou Wenmei. Research on Diffraction-Based Overlay Measurement Using Two-Dimensional Periodic Structure[J]. Laser & Optoelectronics Progress, 2014, 51(2): 21201

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Sep. 17, 2013

    Accepted: --

    Published Online: Jan. 21, 2014

    The Author Email: Bofang Peng (pbfcq@sina.com)

    DOI:10.3788/lop51.021201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology