Optics and Precision Engineering, Volume. 27, Issue 7, 1536(2019)
Active compensation of contour error of X-Y linear motor precision motion platform
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WANG Rong-kun, YU Zuo-chao, WANG Jie. Active compensation of contour error of X-Y linear motor precision motion platform[J]. Optics and Precision Engineering, 2019, 27(7): 1536
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Received: Jan. 30, 2019
Accepted: --
Published Online: Sep. 2, 2019
The Author Email: Rong-kun WANG (wangrongkun@hqu.edu.cn)
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