Optics and Precision Engineering, Volume. 31, Issue 11, 1652(2023)

Low stress laser welding technology for corrugated diaphragm of pressure sensor

Xiaohui DU1,*... Fanhong CHEN1, Shuai LIU1, Minjie ZHU1 and Jiahao XU2 |Show fewer author(s)
Author Affiliations
  • 1Instrumentation Technology and Economy Institute, Beijing00055, China
  • 2Nanchang University of Aeronautics, Nanchang330063, China
  • show less
    Figures & Tables(13)
    Laser welding process for corrugated diaphragm of pressure sensor
    Photo of welding spot with laser power of 300 W, pulse frequency of 100 Hz, and pulse width of 1 ms
    Schematic diagram of weld residual stress detection point and collimator working angles
    Photos of weld spot overlap after orthogonal test according to Tab.4
    Sectional view of weld seam with welding power of 350 W, pulse frequency of 150 Hz, pulse width of 1.5 ms, and turntable speed of 4 200 (°)/min
    Tensile loading curve of welding strength tensile test with welding power of 350 W, pulse frequency of 150 Hz, pulse width of 1.5 ms and turntable speed of 4 200 (°)/min
    • Table 1. Orthogonal experimental factors for laser welding of corrugated diaphragm

      View table
      View in Article

      Table 1. Orthogonal experimental factors for laser welding of corrugated diaphragm

      因素

      功率/

      W

      脉冲频率/Hz脉冲宽度/ms

      转台转速/

      ((°)·min-1

      列号Pftω
    • Table 2. Level value setting of orthogonal test factors in larger range

      View table
      View in Article

      Table 2. Level value setting of orthogonal test factors in larger range

      序号P/Wf/Hzt/msω/((°)·min-1
      130010013 600
      240015024 200
      350020034 800
    • Table 3. Orthogonal test level values after adjusting power, pulse frequency and pulse width

      View table
      View in Article

      Table 3. Orthogonal test level values after adjusting power, pulse frequency and pulse width

      序号P/Wf/Hzt/msω/((°)·min-1
      135015013 600
      24001801.54 200
      345021024 800
    • Table 4. Orthogonal test table designed according to factors in Tab.3

      View table
      View in Article

      Table 4. Orthogonal test table designed according to factors in Tab.3

      序号P/Wf/Hzt/msω/((°)·min-1因素水平组合编号
      13501501.03 600P1f1t1ω1
      23501801.54 200P1f2t2ω2
      33502102.04 800P1f3t3ω3
      44001501.54 800P2f1t2ω3
      54001802.03 600P2f2t3ω1
      64002101.04 200P2f3t1ω2
      74501502.04 200P3f1t3ω2
      84501801.04 800P3f2t1ω3
      94502101.53 600P3f3t2ω1
    • Table 5. Statistics of residual stress data after performing orthogonal test according to Tab.4

      View table
      View in Article

      Table 5. Statistics of residual stress data after performing orthogonal test according to Tab.4

      序号

      因素水平

      组合编号

      残余应力/MPa
      1#点2#点均值
      1P1f1t1ω1234.2±98.9-32.4±75.0133.30
      2P1f2t2ω2215.6±71.7-9.4±61.2112.50
      3P1f3t3ω3218.1±9.3148.9±44.7183.50
      4P2f1t2ω3134.1±79.2157.3±27.3145.70
      5P2f2t3ω1136.1±53.1-201.6±87.4168.85
      6P2f3t1ω2275.9±52.2-66.7±110.4171.30
      7P3f1t3ω2175.4±69.3-195.1±12.7185.25
      8P3f2t1ω3295.4±108.1-147±11.9221.20
      9P3f3t2ω1114.8±124.5-270.2±40.8192.50
    • Table 6. Range results calculated by orthogonal test based on data in Tab.4 and Tab.5

      View table
      View in Article

      Table 6. Range results calculated by orthogonal test based on data in Tab.4 and Tab.5

      序号Pftω
      K1429.30464.250525.800494.650
      K2485.85502.050450.700469.050
      K3598.95547.300537.600550.400
      k1143.10154.750173.935164.885
      k2161.95167.235150.235156.350
      k3199.65167.515179.200183.465
      R56.5512.76528.96527.115
    • Table 7. Calculation results of static performance parameters of sensors before and after welding corrugated diaphragm

      View table
      View in Article

      Table 7. Calculation results of static performance parameters of sensors before and after welding corrugated diaphragm

      传感器零点输出/mV灵敏度/(mV·kPa-1满量程输出/mV非线性/%迟滞/%重复性/%
      1-焊接前-6.183 50.445 3111.327 70.166 30.064 30.105 8
      1-焊接后-5.139 60.431 8107.960 70.170 60.065 20.101 8
      2-焊接前-3.060 90.446 1111.518 20.161 20.065 70.104 2
      2-焊接后-2.531 00.433 7108.417 20.171 00.063 20.100 8
      商用传感器-4.978 80.427 6106.907 10.270 50.164 20.200 8
    Tools

    Get Citation

    Copy Citation Text

    Xiaohui DU, Fanhong CHEN, Shuai LIU, Minjie ZHU, Jiahao XU. Low stress laser welding technology for corrugated diaphragm of pressure sensor[J]. Optics and Precision Engineering, 2023, 31(11): 1652

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Nov. 24, 2022

    Accepted: --

    Published Online: Jul. 4, 2023

    The Author Email: DU Xiaohui (dxh@instrnet.com)

    DOI:10.37188/OPE.20233111.1652

    Topics