Optics and Precision Engineering, Volume. 31, Issue 11, 1652(2023)
Low stress laser welding technology for corrugated diaphragm of pressure sensor
To develop a low-stress laser welding process for the corrugated diaphragm of a pressure sensor, a process scheme for the welding of the corrugated diaphragm using laser welding technology is designed, an optimization method for the key welding process parameters based on an orthogonal test is proposed, the orthogonal test table of the welding process is designed, and an orthogonal test with the residual stress of welding as the evaluation index is completed. Based on the best combination of welding process parameters obtained via the orthogonal test, the pressure sensors are welded, and the testing and verification of welding sealing, tensile strength, and static performance indicators of the sensors are completed. The experimental results indicate that a laser power of 350 W, pulse frequency of 150 Hz, pulse width of 1.5 ms, and turntable speed of 4 200 (°)/min are the optimal combination parameters of the laser welding process for the corrugated diaphragm of the pressure sensor; a rough calculation value of 499.60 MPa is obtained for the weld tensile strength of the pressure sensor, and the weld has a good sealing property. After welding the corrugated diaphragm, the zero output of the sensor is increased by approximately 17%, and indices such as sensitivity, full-scale output, nonlinearity, hysteresis, and repeatability exhibit little change. However, the nonlinearity, hysteresis, and repeatability are approximately two times better than those of the same type of sensor from the same manufacturer. The optimal laser welding process determined via the orthogonal test can ensure the high-quality packaging application of pressure sensors.
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Xiaohui DU, Fanhong CHEN, Shuai LIU, Minjie ZHU, Jiahao XU. Low stress laser welding technology for corrugated diaphragm of pressure sensor[J]. Optics and Precision Engineering, 2023, 31(11): 1652
Category: Micro/Nano Technology and Fine Mechanics
Received: Nov. 24, 2022
Accepted: --
Published Online: Jul. 4, 2023
The Author Email: DU Xiaohui (dxh@instrnet.com)