Imaging Electron Optics of Electrostatic Focusing Concentric Spherical System Part D: Determination of Minimum Diffusing Circle and Optimal Image Position

Liwei Zhou

doi:10.3788/AOS202242.0811004

Acta Optica Sinica, Volume. 42, Issue 8, 0811004(2022)

Imaging Electron Optics of Electrostatic Focusing Concentric Spherical System Part D: Determination of Minimum Diffusing Circle and Optimal Image Position

Liwei Zhou^*

Author Affiliations

School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China

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Figures & Tables(4)

Fig. 1. Crossover formed by electron beam in electrostatic focusing concentric spherical system. (a) Formation of crossover; (b) enlarged view of crossover tail

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Fig. 2. Determination of optimal image plane position and its minimum diffusion circle

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Fig. 3. Focal diffusing surface and conical surface at imaging section formed by electron beam emitted from axial object point

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Table 1. Lateral aberration formed by electron beam emitted from axial object point from limiting image plane to Gauss image plane (image spot)
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Table 1. Lateral aberration formed by electron beam emitted from axial object point from limiting image plane to Gauss image plane (image spot)
cos δ₀ 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
Δρ_1v 1.00000 0.86117 0.72792 0.60090 0.48096 0.36901 0.26630 0.17444 0.09576 0.03414 0
Δρ_2v 0 0.20000 0.40000 0.60000 0.80000 1.00000 1.20000 1.40000 1.60000 1.80000 2.00000

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Liwei Zhou. Imaging Electron Optics of Electrostatic Focusing Concentric Spherical System Part D: Determination of Minimum Diffusing Circle and Optimal Image Position[J]. Acta Optica Sinica, 2022, 42(8): 0811004

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