Journal of Synthetic Crystals, Volume. 52, Issue 10, 1733(2023)
Research Status of Preparation and Processing of Large-Size Single Crystal Diamond Substrates for Semiconductors
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LIU Junjie, GUAN Chunlong, YI Jian, SONG Hui, JIANG Nan, KAZUHITO Nishimura. Research Status of Preparation and Processing of Large-Size Single Crystal Diamond Substrates for Semiconductors[J]. Journal of Synthetic Crystals, 2023, 52(10): 1733
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Received: May. 9, 2023
Accepted: --
Published Online: Oct. 28, 2023
The Author Email: Junjie LIU (liujunjie@nimte.ac.cn)
CSTR:32186.14.