Journal of Synthetic Crystals, Volume. 52, Issue 10, 1733(2023)

Research Status of Preparation and Processing of Large-Size Single Crystal Diamond Substrates for Semiconductors

LIU Junjie1...2,*, GUAN Chunlong1, YI Jian2, SONG Hui2, JIANG Nan2 and KAZUHITO Nishimura2 |Show fewer author(s)
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    LIU Junjie, GUAN Chunlong, YI Jian, SONG Hui, JIANG Nan, KAZUHITO Nishimura. Research Status of Preparation and Processing of Large-Size Single Crystal Diamond Substrates for Semiconductors[J]. Journal of Synthetic Crystals, 2023, 52(10): 1733

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    Paper Information

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    Received: May. 9, 2023

    Accepted: --

    Published Online: Oct. 28, 2023

    The Author Email: Junjie LIU (liujunjie@nimte.ac.cn)

    DOI:

    CSTR:32186.14.

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