Acta Optica Sinica, Volume. 44, Issue 2, 0222003(2024)

Vertical Grating Coupler Based on Double-Layer Silicon Nitride Antireflection

Zhe Ji1、*, Dong Li1, Shiru Fu1, Yingzhan Yan2, and Dagong Jia3
Author Affiliations
  • 1Hebei Key Laboratory of Mechanical Power and Transmission Control, School of Mechanical Engineering, Shijiazhuang Tiedao University, Shijiazhuang 050043, Hebei, China
  • 2Information Science Academy of China Electronics Technology Group Corporation, Beijing 100041, China
  • 3Key Laboratory of Opto-Electronics Information Technology, Ministry of Education, School of Precision Instrument and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
  • show less
    References(26)

    [1] Luo Y N, Nong Z C, Gao S Q et al. Low-loss two-dimensional silicon photonic grating coupler with a backside metal mirror[J]. Optics Letters, 43, 474-477(2018).

    [2] Roelkens G, van Thourhout D, Baets R. High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay[J]. Optics Express, 14, 11622-11630(2006).

    [3] He Y. Research on grating coupling device based on SOI structure[D](2018).

    [4] Marchetti R, Lacava C, Khokhar A et al. High-efficiency grating-couplers: demonstration of a new design strategy[J]. Scientific Reports, 7, 16670(2017).

    [5] Zhao R, Sun C L, Xu X et al. Ultra-compact vertical optical coupler based on subwavelength grating[J]. Acta Optica Sinica, 40, 1405002(2020).

    [6] Tian M, Qu M N, Wu L Y et al. Progress on asymmetrical grating couplers for vertical coupling[J]. Laser & Optoelectronics Progress, 58, 0500004(2021).

    [7] Yang F, Fang H, Han H P et al. Wide bandwidth silicon nitride strip-loaded grating coupler on lithium niobate thin film[J]. Crystals, 12, 70(2022).

    [8] Singh R, Singh R R, Priye V. Parametric optimization of fiber to waveguide coupler using Bragg gratings[J]. Optical and Quantum Electronics, 51, 1-10(2019).

    [9] Zhang Z Y, Huang B J, Zhang Z et al. Highly efficient vertical fiber interfacing grating coupler with bilayer anti-reflection cladding and backside metal mirror[J]. Optics & Laser Technology, 90, 136-143(2017).

    [10] Zhang Z, Shan X T, Huang B J et al. Efficiency enhanced grating coupler for perfectly vertical fiber-to-chip coupling[J]. Materials, 13, 2681(2020).

    [11] Yang B, Li Z Y, Xiao X et al. The progress of silicon-based grating couplers[J]. Acta Physica Sinica, 62, 184214(2013).

    [12] Zhang X Y. Research on a novel vertical grating coupler for on-chip optical interconnection based on VCSEL[D](2020).

    [13] Zhou K. Research on silicon-based grating coupler and waveguide beam splitter[D](2016).

    [14] Yu L, Liu L, Zhou Z P et al. High efficiency binary blazed grating coupler for perfectly-vertical and near-vertical coupling in chip level optical interconnections[J]. Optics Communications, 355, 161-166(2015).

    [15] Dabos G, Bolten J, Prinzen A et al. Perfectly vertical and fully etched SOI grating couplers for TM polarization[J]. Optics Communications, 350, 124-127(2015).

    [16] Asaduzzaman M, Bakaul M, Skafidas S et al. Multiple layers of silicon-silica (Si-SiO2) pair onto silicon substrate towards highly efficient, wideband silicon photonic grating coupler[J]. Optical and Quantum Electronics, 48, 478(2016).

    [17] Tao S C, Chen H Y. Absorption characteristics of perfect absorber, electromagnetic “black hole” and inner perfectly matched layer[J]. Acta Physica Sinica, 69, 211-220(2020).

    [18] Xu P F, Song X Y, Zhou D C et al. Bismuthate glass microstructure fiber with high birefringence and large negative dispersion[J]. Chinese Journal of Lasers, 48, 2406002(2021).

    [19] Chen Y T, Qiu J F, Dong Z L et al. Inverse design and demonstration of vertical couplers[J]. Acta Optica Sinica, 41, 1713001(2021).

    [20] Yang X. Research on design of polymer waveguide grating coupler[D](2012).

    [21] Zhou L, Li Z Y, Hu Y T et al. CMOS compatible highly efficient grating couplers with a stair-step blaze profile[J]. Chinese Physics B, 20, 074212(2011).

    [22] Ran N, Chen X Y, Wang Z K et al. Optimization and experiments of on-chip silicon nitride grating couplers[J]. Acta Optica Sinica, 43, 0113002(2023).

    [23] Zhu C L, Jiao Q B, Tan X et al. Fast convergent particle swarm optimization algorithm for subwavelength azimuthally polarized metal grating design[J]. Acta Optica Sinica, 39, 0705002(2019).

    [24] Xie J Y, Su G S, Li M Y et al. Temperature sensor cascading reflective Fabry-Perot cavity with microring resonator[J]. Acta Optica Sinica, 42, 2328002(2022).

    [25] Huang Q, Zhang Y, Jiang P L et al. Research on high-efficiency coupling gratings applied to silicon germanium materials[J]. Laser & Optoelectronics Progress, 59, 1913002(2022).

    [26] Liu Y K, She X, Liu H S et al. Low-loss apodized grating couplers based on lithium niobate on insulator[J]. Acta Optica Sinica, 43, 1913001.

    Tools

    Get Citation

    Copy Citation Text

    Zhe Ji, Dong Li, Shiru Fu, Yingzhan Yan, Dagong Jia. Vertical Grating Coupler Based on Double-Layer Silicon Nitride Antireflection[J]. Acta Optica Sinica, 2024, 44(2): 0222003

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: Aug. 17, 2023

    Accepted: Nov. 6, 2023

    Published Online: Jan. 11, 2024

    The Author Email: Ji Zhe (jiyouyou1001@126.com)

    DOI:10.3788/AOS231434

    Topics