Chinese Optics Letters, Volume. 10, Issue 6, 061202(2012)
Novel technique for characterizing feature profiles in photolithography process
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Fan Wang, Hailiang Lu, Qingyun Zhang, Anatoly Burov. Novel technique for characterizing feature profiles in photolithography process[J]. Chinese Optics Letters, 2012, 10(6): 061202
Paper Information
Category: Instrumentation, measurement, and metrology
Received: Nov. 15, 2011
Accepted: Dec. 28, 2011
Published Online: Mar. 13, 2012
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