Acta Optica Sinica, Volume. 43, Issue 16, 1623016(2023)

Angle-Resolved Spectroscopy and Its Applications

Jingyi Zhao1,2,3,4, Maoxiong Zhao1,2,3,4、*, Lei Shi1,2,3,4、**, and Jian Zi1,2
Author Affiliations
  • 1State Key Laboratory of Surface Physics, Fudan University, Shanghai 200433, China
  • 2Key Laboratory of Micro- and Nano-Photonic Structures, Ministry of Education, Fudan University, Shanghai 200433, China
  • 3Shanghai Engineering Research Center of Optical Metrology for Nano-Fabrication, Shanghai 200433, China
  • 4Fudan University-Enterprise Joint Research Center for Optic Detection and Optic Integration, Shanghai 200433, China
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    References(150)

    [1] Mohammed A, Abdullah A. Scanning electron microscopy (SEM): a review[C], 2018, 7-9(2018).

    [2] Custance O, Perez R, Morita S. Atomic force microscopy as a tool for atom manipulation[J]. Nature Nanotechnology, 4, 803-810(2009).

    [3] Jonsson J C, Smith G B, Deller C et al. Directional and angle-resolved optical scattering of high-performance translucent polymer sheets for energy-efficient lighting and skylights[J]. Applied Optics, 44, 2745-2753(2005).

    [4] Patrick H J, Germer T A, Cresswell M W et al. Extraction of trench geometry and linewidth of nanoscale grating targets in (110)-oriented silicon using angle-resolved scatterometry[J]. Proceedings of SPIE, 7042, 70420B(2008).

    [5] Schröder S, Herffurth T, Blaschke H et al. Angle-resolved scattering: an effective method for characterizing thin-film coatings[J]. Applied Optics, 50, C164-C171(2011).

    [6] Lin M L, Leng Y C, Cong X et al. Understanding angle-resolved polarized Raman scattering from black phosphorus at normal and oblique laser incidences[J]. Science Bulletin, 65, 1894-1900(2020).

    [7] Lindell D B, Wetzstein G. Three-dimensional imaging through scattering media based on confocal diffuse tomography[J]. Nature Communications, 11, 4517(2020).

    [8] Tan Y Y, Chen C, Chen X G et al. Development of a tomographic Mueller-matrix scatterometer for nanostructure metrology[J]. The Review of Scientific Instruments, 89, 073702(2018).

    [9] Zhao M X, Chen M K, Zhuang Z P et al. Phase characterisation of metalenses[J]. Light: Science & Applications, 10, 52(2021).

    [10] Zhang Y W, Chen A, Liu W Z et al. Observation of polarization vortices in momentum space[J]. Physical Review Letters, 120, 186103(2018).

    [11] Pyhtila J W, Wax A. Rapid, depth-resolved light scattering measurements using Fourier domain, angle-resolved low coherence interferometry[J]. Optics Express, 12, 6178-6183(2004).

    [12] Jung J, Kim W, Kim J et al. Multi spectral holographic ellipsometry for a complex 3D nanostructure[J]. Optics Express, 30, 46956-46971(2022).

    [13] Zhang Y W, Zhao M X, Wang J J et al. Momentum-space imaging spectroscopy for the study of nanophotonic materials[J]. Science Bulletin, 66, 824-838(2021).

    [14] Chen X G, Zhang C W, Liu S Y et al. Mueller matrix ellipsometric detection of profile asymmetry in nanoimprinted grating structures[J]. Journal of Applied Physics, 116, 194305(2014).

    [15] Podoleanu A G. Optical coherence tomography[J]. Journal of Microscopy, 247, 209-219(2012).

    [16] Weng W Q, Chi J J, Wang X C et al. Ellipsoidal porous patch with anisotropic cell inducing ability for inhibiting skin scar formation[J]. Engineered Regeneration, 3, 262-269(2022).

    [17] Wang J J, Zhao M X, Liu W Z et al. Shifting beams at normal incidence via controlling momentum-space geometric phases[J]. Nature Communications, 12, 6046(2021).

    [18] Moharam M G, Gaylord T K, Grann E B et al. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings[J]. Journal of the Optical Society of America A, 12, 1068-1076(1995).

    [19] Reddy J N[M]. Introduction to the finite element method(2019).

    [20] Schneider J B. Understanding the finite-difference time-domain method[D], 28(2010).

    [21] Matsushima K, Shimobaba T. Band-limited angular spectrum method for numerical simulation of free-space propagation in far and near fields[J]. Optics Express, 17, 19662-19673(2009).

    [22] Chen X G, Liu S Y, Zhang C W et al. Improved measurement accuracy in optical scatterometry using correction-based library search[J]. Applied Optics, 52, 6726-6734(2013).

    [23] Stein S E, Scott D R. Optimization and testing of mass spectral library search algorithms for compound identification[J]. Journal of the American Society for Mass Spectrometry, 5, 859-866(1994).

    [24] Dixit D J, O’Mullane S, Sunkoju S et al. Sensitivity analysis and line edge roughness determination of 28-nm pitch silicon fins using Mueller matrix spectroscopic ellipsometry-based optical critical dimension metrology[J]. Journal of Micro/Nanolithography, MEMS, and MOEMS, 14, 031208(2015).

    [25] Zhu J L, Liu S Y, Chen X G et al. Robust solution to the inverse problem in optical scatterometry[J]. Optics Express, 22, 22031-22042(2014).

    [26] Fan Z X, Qian C, Jia Y T et al. Homeostatic neuro-metasurfaces for dynamic wireless channel management[J]. Science Advances, 8, eabn7905(2022).

    [27] Li T Y, Chen A, Fan L J et al. Photonic-dispersion neural networks for inverse scattering problems[J]. Light: Science & Applications, 10, 154(2021).

    [28] Liu J M, Sun Y, Eldeniz C et al. RARE: image reconstruction using deep priors learned without groundtruth[J]. IEEE Journal of Selected Topics in Signal Processing, 14, 1088-1099(2020).

    [29] O’Toole M, Lindell D B, Wetzstein G. Confocal non-line-of-sight imaging based on the light-cone transform[J]. Nature, 555, 338-341(2018).

    [30] Yoo J, Sabir S, Heo D et al. Deep learning diffuse optical tomography[J]. IEEE Transactions on Medical Imaging, 39, 877-887(2020).

    [31] Yu W H, Li X A, Wang B et al. Optical diffraction tomography of second-order nonlinear structures in weak scattering media: theoretical analysis and experimental consideration[J]. Optics Express, 30, 45724-45737(2022).

    [32] Shimizu Y, Chen L C, Kim D W et al. An insight into optical metrology in manufacturing[J]. Measurement Science and Technology, 32, 042003(2021).

    [33] Bergmann R B, Kalms M, Falldorf C. Optical In-process measurement: concepts for precise, fast and robust optical metrology for complex measurement situations[J]. Applied Sciences, 11, 10533(2021).

    [34] Gatebe C K, King M D. Airborne spectral BRDF of various surface types (ocean, vegetation, snow, desert, wetlands, cloud decks, smoke layers) for remote sensing applications[J]. Remote Sensing of Environment, 179, 131-148(2016).

    [35] Jiao Z T, Schaaf C B, Dong Y D et al. A method for improving hotspot directional signatures in BRDF models used for MODIS[J]. Remote Sensing of Environment, 186, 135-151(2016).

    [36] Song Q H, Liu X S, Qiu C W et al. Vectorial metasurface holography[J]. Applied Physics Reviews, 9, 011311(2022).

    [37] Deng J A, Deng L G, Zhou Z et al. Single-sized multifunctional metasurfaces for simultaneous nanoprinting and holography inspired by tri-redundancy[J]. Optics Express, 30, 29161-29172(2022).

    [38] Gong L, Lin S L, Huang Z W. Stimulated Raman scattering tomography enables label-free volumetric deep tissue imaging[J]. Laser & Photonics Reviews, 15, 2100069(2021).

    [39] Novikova T, De Martino A, Bulkin P et al. Metrology of replicated diffractive optics with Mueller polarimetry in conical diffraction[J]. Optics Express, 15, 2033-2046(2007).

    [40] Goodman J W[M]. Introduction to Fourier optics(2005).

    [41] Che Z Y, Zhang Y B, Liu W Z et al. Polarization singularities of photonic quasicrystals in momentum space[J]. Physical Review Letters, 127, 043901(2021).

    [42] Iftimia N, Bouma B E, Tearney G J. Speckle reduction in optical coherence tomography by “path length encoded” angular compounding[J]. Journal of Biomedical Optics, 8, 260-263(2003).

    [43] Sung Y, Choi W, Fang-Yen C et al. Optical diffraction tomography for high resolution live cell imaging[J]. Optics Express, 17, 266-277(2009).

    [44] Zheng C, Zhao G Y, Liu W J et al. Three-dimensional super-resolved live cell imaging through polarized multi-angle TIRF[J]. Optics Letters, 43, 1423-1426(2018).

    [45] Lucht W, Schaaf C B, Strahler A H. An algorithm for the retrieval of albedo from space using semiempirical BRDF models[J]. IEEE Transactions on Geoscience and Remote Sensing, 38, 977-998(2000).

    [46] Maria J, Aas L M S, Kildemo M. In and out of incidence plane Mueller matrix scattering ellipsometry of rough mc-Si[J]. Thin Solid Films, 571, 399-404(2014).

    [47] Chen C, Chen X G, Shi Y T et al. Metrology of nanostructures by tomographic Mueller-matrix scatterometry[J]. Applied Sciences, 8, 2583(2018).

    [48] Kumar N, Petrik P, Ramanandan G K P et al. Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry[J]. Optics Express, 22, 24678-24688(2014).

    [49] Shyu D M, Ku Y S, Hsu W T. Angle-resolved scatterfield microscope for linewidth measurement[J]. Proceedings of SPIE, 7272, 72721L(2009).

    [50] Jošt M, Krč J, Topič M. Camera-based angular resolved spectroscopy system for spatial measurements of scattered light[J]. Applied Optics, 53, 4795-4803(2014).

    [51] Raymond C. Overview of scatterometry applications in high volume silicon manufacturing[C], 788, 394-402(2005).

    [52] Kajfez D. Q-factor[M]. Encyclopedia of RF and microwave engineering(2005).

    [53] Hsu C W, Zhen B, Lee J et al. Observation of trapped light within the radiation continuum[J]. Nature, 499, 188-191(2013).

    [54] Fan S H, Joannopoulos J D. Analysis of guided resonances in photonic crystal slabs[J]. Physical Review B, 65, 235112(2002).

    [55] Zhen B, Hsu C W, Igarashi Y et al. Spawning rings of exceptional points out of Dirac cones[J]. Nature, 525, 354-358(2015).

    [56] Fan S H, Suh W, Joannopoulos J D. Temporal coupled-mode theory for the Fano resonance in optical resonators[J]. Journal of the Optical Society of America. A, Optics, Image Science, and Vision, 20, 569-572(2003).

    [57] Jin J C, Yin X F, Ni L F et al. Topologically enabled ultrahigh-Q guided resonances robust to out-of-plane scattering[J]. Nature, 574, 501-504(2019).

    [58] Fujiwara H[M]. Spectroscopic ellipsometry: principles and applications(2007).

    [59] Gil J J, Bernabeu E. A depolarization criterion in Mueller matrices[J]. Optica Acta: International Journal of Optics, 32, 259-261(1985).

    [60] Hatit S B, Foldyna M, De Martino A et al. Angle-resolved Mueller polarimeter using a microscope objective[J]. Physica Status Solidi (a), 205, 743-747(2008).

    [61] Sannomiya T, Balmer T E, Hafner C et al. Optical sensing and determination of complex reflection coefficients of plasmonic structures using transmission interferometric plasmonic sensor[J]. Review of Scientific Instruments, 81, 053102(2010).

    [62] Bliokh K Y. Geometrical optics of beams with vortices: berry phase and orbital angular momentum Hall effect[J]. Physical Review Letters, 97, 043901(2006).

    [63] Xiao D, Chang M C, Niu Q. Berry phase effects on electronic properties[J]. Reviews of modern physics, 82, 1959(2010).

    [64] Busch P, Heinonen T, Lahti P. Heisenberg’s uncertainty principle[J]. Physics Reports, 452, 155-176(2007).

    [65] Carlon Zambon N, St-Jean P, Milićević M et al. Optically controlling the emission chirality of microlasers[J]. Nature Photonics, 13, 283-288(2019).

    [66] Wang B, Liu W Z, Zhao M X et al. Generating optical vortex beams by momentum-space polarization vortices centred at bound states in the continuum[J]. Nature Photonics, 14, 623-628(2020).

    [67] Liu P S, Lü B D. The vectorial angular-spectrum representation and Rayleigh-Sommerfeld diffraction formulae[J]. Optics & Laser Technology, 39, 741-744(2007).

    [68] Ulanowski Z, Wang Z N, Kaye P H et al. Application of neural networks to the inverse light scattering problem for spheres[J]. Applied Optics, 37, 4027-4033(1998).

    [69] Ferreras Paz V, Peterhänsel S, Frenner K et al. Solving the inverse grating problem by white light interference Fourier scatterometry[J]. Light: Science & Applications, 1, e36(2012).

    [70] Björck Å. Least squares methods[J]. Handbook of Numerical Analysis, 1, 465-652(1990).

    [71] Moré J J. The Levenberg-Marquardt algorithm: implementation and theory[M]. Watson G A. Numerical analysis. Lecture notes in mathematics, 630, 105-116(2006).

    [72] LeCun Y, Bengio Y, Hinton G. Deep learning[J]. Nature, 521, 436-444(2015).

    [73] Albawi S, Mohammed T A, Al-Zawi S. Understanding of a convolutional neural network[C](2018).

    [75] Kim I, Bae Y, Gwak S et al. Machine learning aided profile measurement in high-aspect-ratio nanostructures[J]. Proceedings of SPIE, 11783, 117830K(2021).

    [76] Monakhova K, Yanny K, Aggarwal N et al. Spectral DiffuserCam: lensless snapshot hyperspectral imaging with a spectral filter array[J]. Optica, 7, 1298-1307(2020).

    [77] Yee K S, Chen J S. The finite-difference time-domain (FDTD) and the finite-volume time-domain (FVTD) methods in solving Maxwell’s equations[J]. IEEE Transactions on Antennas and Propagation, 45, 354-363(1997).

    [78] Clough G W, Duncan J M. Finite element analyses of retaining wall behavior[J]. Journal of the Soil Mechanics and Foundations Division, 97, 1657-1673(1971).

    [79] Liu S Y, Chen X G, Zhang C W. Development of a broadband Mueller matrix ellipsometer as a powerful tool for nanostructure metrology[J]. Thin Solid Films, 584, 176-185(2015).

    [80] Collins R W, Koh J. Dual rotating-compensator multichannel ellipsometer: instrument design for real-time Mueller matrix spectroscopy of surfaces and films[J]. Journal of the Optical Society of America A, 16, 1997-2006(1999).

    [81] Cousins A K, Gottschalk S C. Application of the impedance formalism to diffraction gratings with multiple coating layers[J]. Applied Optics, 29, 4268-4271(1990).

    [82] Azzam R M A, Bashara N M, Ballard S S. Ellipsometry and polarized light[J]. Physics Today, 31, 72(1978).

    [83] Novikova T, De Martino A, Hatit S B et al. Application of Mueller polarimetry in conical diffraction for critical dimension measurements in microelectronics[J]. Applied Optics, 45, 3688-3697(2006).

    [84] Weidner A, Slodowski M, Halm C et al. Effective-medium model for fast evaluation of scatterometric measurements on gratings[J]. Proceedings of SPIE, 5375, 232-243(2004).

    [85] Woollam J A, Johs B D, Herzinger C M et al. Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications[J]. Proceedings of SPIE, 10294, 1029402(1999).

    [86] Hecht E[M]. Optics, 223-257(2012).

    [87] Nestell J E, Christy R W. Derivation of optical constants of metals from thin-film measurements at oblique incidence[J]. Applied Optics, 11, 643-651(1972).

    [88] Snyder P G, Rost M C, Bu-Abbud G H et al. Variable angle of incidence spectroscopic ellipsometry: application to GaAs-AlxGa1–xAs multiple heterostructures[J]. Journal of Applied Physics, 60, 3293-3302(1986).

    [89] Huang H T, Kong W, Terry F L,. Normal-incidence spectroscopic ellipsometry for critical dimension monitoring[J]. Applied Physics Letters, 78, 3983-3985(2001).

    [90] Goldstein D H. Mueller matrix dual-rotating retarder polarimeter[J]. Applied Optics, 31, 6676-6683(1992).

    [91] Hounsfield G N. Computerized transverse axial scanning (tomography). 1. Description of system[J]. The British Journal of Radiology, 46, 1016-1022(1973).

    [92] Kalender W A. X-ray computed tomography[J]. Physics in Medicine and Biology, 51, R29-R43(2006).

    [93] Schmitt J M, Xiang S H, Yung K M. Speckle in optical coherence tomography[J]. Journal of Biomedical Optics, 4, 95-105(1999).

    [94] Schmitt J M. Array detection for speckle reduction in optical coherence microscopy[J]. Physics in Medicine and Biology, 42, 1427-1439(1997).

    [95] Bashkansky M, Reintjes J. Statistics and reduction of speckle in optical coherence tomography[J]. Optics Letters, 25, 545-547(2000).

    [96] Bertolotti J, van Putten E G, Blum C et al. Non-invasive imaging through opaque scattering layers[J]. Nature, 491, 232-234(2012).

    [97] Feng S C, Kane C, Lee P A et al. Correlations and fluctuations of coherent wave transmission through disordered media[J]. Physical Review Letters, 61, 834-837(1988).

    [98] Liu H L, Liu Z T, Chen M J et al. Physical picture of the optical memory effect[J]. Photonics Research, 7, 1323-1330(2019).

    [99] Chen M J, Liu H L, Liu Z T et al. Expansion of the FOV in speckle autocorrelation imaging by spatial filtering[J]. Optics Letters, 44, 5997-6000(2019).

    [100] Jin L H, Wu J, Xiu P et al. High-resolution 3D reconstruction of microtubule structures by quantitative multi-angle total internal reflection fluorescence microscopy[J]. Optics Communications, 395, 16-23(2017).

    [101] Kang S, Jeong S, Choi W et al. Imaging deep within a scattering medium using collective accumulation of single-scattered waves[J]. Nature Photonics, 9, 253-258(2015).

    [102] Zhu S, Guo E L, Gu J E et al. Imaging through unknown scattering media based on physics-informed learning[J]. Photonics Research, 9, B210-B219(2021).

    [103] Gibson A, Dehghani H. Diffuse optical imaging[J]. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 367, 3055-3072(2009).

    [104] Hoshi M D Y, Yamada Y. Overview of diffuse optical tomography and its clinical applications[J]. Journal of Biomedical Optics, 21, 091312(2016).

    [105] Seraphin B O, Bennett H E. Optical constants[M]. Semiconductors and semimetals, 3, 499-543(1967).

    [106] Robinson T S. Optical constants by reflection[J]. Proceedings of the Physical Society Section B, 65, 910-911(1952).

    [107] Steel M R. Optical properties and electronic structure of metals and alloys[D](1972).

    [108] Johnson P B, Christy R W. Optical constants of the noble metals[J]. Physical Review B, 6, 4370-4379(1972).

    [109] Nguyen N V, Chandler-Horowitz D, Amirtharaj P M et al. Spectroscopic ellipsometry determination of the properties of the thin underlying strained Si layer and the roughness at SiO2/Si interface[J]. Applied Physics Letters, 64, 2688-2690(1994).

    [110] Herzinger C M, Johs B, McGahan W A et al. Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation[J]. Journal of Applied Physics, 83, 3323-3336(1998).

    [111] Kravets V G, Grigorenko A N, Nair R R et al. Spectroscopic ellipsometry of graphene and an exciton-shifted van Hove peak in absorption[J]. Physical Review B, 81, 155413(2010).

    [112] Wan C H, Zhang Z, Woolf D et al. On the optical properties of thin-film vanadium dioxide from the visible to the far infrared[J]. Annalen Der Physik, 531, 1900188(2019).

    [113] Orji N G, Badaroglu M, Barnes B M et al. Metrology for the next generation of semiconductor devices[J]. Nature Electronics, 1, 532-547(2018).

    [114] Raymond C J. Scatterometry for semiconductor metrology[M]. Diebold A C. Handbook of silicon semiconductor metrology, 389-418(2001).

    [115] Herffurth T, Schröder S, Trost M et al. Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor[J]. Applied Optics, 52, 3279-3287(2013).

    [116] Chao R, Liu C C, Bozdog C et al. Scatterometry-based defect detection for DSA in-line process control[J]. Proceedings of SPIE, 9424, 942419(2015).

    [117] Wang B, Tanksalvala M, Zhang Z et al. Coherent Fourier scatterometry using orbital angular momentum beams for defect detection[J]. Optics Express, 29, 3342-3358(2021).

    [118] Wang C, Chen X G, Chen C et al. Reconstruction of finite deep sub-wavelength nanostructures by Mueller-matrix scattered-field microscopy[J]. Optics Express, 29, 32158-32168(2021).

    [119] Shankar N G, Zhong Z W. Defect detection on semiconductor wafer surfaces[J]. Microelectronic Engineering, 77, 337-346(2005).

    [120] Schuegraf K, Abraham M C, Brand A et al. Semiconductor logic technology innovation to achieve sub-10 nm manufacturing[J]. IEEE Journal of the Electron Devices Society, 1, 66-75(2013).

    [121] Liu J M, Zhao H, Wu Q Z et al. Patterned wafer defect inspection at advanced technology nodes[J]. Laser & Optoelectronics Progress, 60, 0312003(2023).

    [122] Zhou Z D, Luo H Y, Xiong W et al. Spot-scanning laser scattering system for defects detection of wafer surface[J]. Proceedings of SPIE, 12478, 124782D(2022).

    [123] Zhu J L, Liu J M, Xu T L et al. Optical wafer defect inspection at the 10 nm technology node and beyond[J]. International Journal of Extreme Manufacturing, 4, 032001(2022).

    [124] Joo J Y, Lee J H, Jang W H et al. Defect height estimation via model-less TSOM under optical resolution[J]. Optics Express, 29, 27508-27520(2021).

    [125] Nair R V, Vijaya R. Photonic crystal sensors: an overview[J]. Progress in Quantum Electronics, 34, 89-134(2010).

    [126] Fang Z Y, Thongrattanasiri S, Schlather A et al. Gated tunability and hybridization of localized plasmons in nanostructured graphene[J]. ACS Nano, 7, 2388-2395(2013).

    [127] Feng L, Xu Y L, Fegadolli W S et al. Experimental demonstration of a unidirectional reflectionless parity-time metamaterial at optical frequencies[J]. Nature Materials, 12, 108-113(2013).

    [128] Miri M A, Alù A. Exceptional points in optics and photonics[J]. Science, 363, eaar7709(2019).

    [129] Shen H T, Zhen B, Fu L A. Topological band theory for non-Hermitian Hamiltonians[J]. Physical Review Letters, 120, 146402(2018).

    [130] Krasnok A, Baranov D, Li H N et al. Anomalies in light scattering[J]. Advances in Optics and Photonics, 11, 892-951(2019).

    [131] Noda S, Tomoda K, Yamamoto N et al. Full three-dimensional photonic bandgap crystals at near-infrared wavelengths[J]. Science, 289, 604-606(2000).

    [132] Shelby R A, Smith D R, Schultz S. Experimental verification of a negative index of refraction[J]. Science, 292, 77-79(2001).

    [133] Engelen R J P, Sugimoto Y, Gersen H et al. Ultrafast evolution of photonic eigenstates in k-space[J]. Nature Physics, 3, 401-405(2007).

    [134] Shi L, Liu X H, Yin H W et al. Optical response of a flat metallic surface coated with a monolayer array of latex spheres[J]. Physics Letters A, 374, 1059-1062(2010).

    [135] Osorio C I, Mohtashami A, Koenderink A F. K-space polarimetry of bullseye plasmon antennas[J]. Scientific Reports, 5, 9966(2015).

    [136] Genco A, Cruciano C, Corti M et al. K-space hyperspectral imaging by a birefringent common-path interferometer[J]. ACS Photonics, 9, 3563-3572(2022).

    [137] Chu J, Chen Y, Tan S Y et al. Edible amorphous structural color[J]. Advanced Optical Materials, 10, 2102125(2022).

    [138] Liu X Y. Airborne LiDAR for DEM generation: some critical issues[J]. Progress in Physical Geography: Earth and Environment, 32, 31-49(2008).

    [139] Ntziachristos V. Going deeper than microscopy: the optical imaging frontier in biology[J]. Nature Methods, 7, 603-614(2010).

    [140] Eggebrecht A T, Ferradal S L, Robichaux-Viehoever A et al. Mapping distributed brain function and networks with diffuse optical tomography[J]. Nature Photonics, 8, 448-454(2014).

    [141] Fienup J R, Tippie A E. Gigapixel synthetic-aperture digital holography[J]. Proceedings of SPIE, 8122, 812203(2011).

    [142] Zheng G A, Horstmeyer R, Yang C. Wide-field, high-resolution Fourier ptychographic microscopy[J]. Nature Photonics, 7, 739-745(2013).

    [143] Montes R, Ureña C. An overview of BRDF models: technical report LSI-2012-001[R](2012).

    [144] Bartell F O, Dereniak E L, Wolfe W L. The theory and measurement of bidirectional reflectance distribution function (brdf) and bidirectional transmittance distribution function (BTDF)[J]. Proceedings of SPIE, 0257, 154-160(1981).

    [145] Hou Q Y, Wang Z L, Su J Y et al. Measurement of equivalent BRDF on the surface of solar panel with periodic structure[J]. Coatings, 9, 193(2019).

    [146] Jia W, Pang Y, Tortini R et al. A kernel-driven BRDF approach to correct airborne hyperspectral imagery over forested areas with rugged topography[J]. Remote Sensing, 12, 432(2020).

    [147] Bieron J, Peers P. An adaptive BRDF fitting metric[J]. Computer Graphics Forum, 39, 59-74(2020).

    [148] Inoue S, Igarashi Y, Hoshi T et al. Measuring BRDF for curved surfaces based on parabolic reflection[J]. Optics Continuum, 1, 1637-1651(2022).

    [149] Ceolato R, Riviere N, Jorand R et al. Light-scattering by aggregates of tumor cells: spectral, polarimetric, and angular measurements[J]. Journal of Quantitative Spectroscopy and Radiative Transfer, 146, 207-213(2014).

    [150] Pang S M, Xie Y R, Zhang J. Review of investigating the elastic and thermal properties by angle-resolved Brillouin light scattering[J]. The Journal of Light Scattering, 33, 101-111(2021).

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    Jingyi Zhao, Maoxiong Zhao, Lei Shi, Jian Zi. Angle-Resolved Spectroscopy and Its Applications[J]. Acta Optica Sinica, 2023, 43(16): 1623016

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    Paper Information

    Category: Optical Devices

    Received: Apr. 23, 2023

    Accepted: Jun. 15, 2023

    Published Online: Aug. 1, 2023

    The Author Email: Zhao Maoxiong (maoxzhao@fudan.edu.cn), Shi Lei (lshi@fudan.edu.cn)

    DOI:10.3788/AOS230860

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