Acta Physica Sinica, Volume. 69, Issue 5, 054206-1(2020)

Design of polarization-insensitive 1 × 2 multimode interference demultiplexer based on Si3N4/SiNx/Si3N4 sandwiched structure

Jing-Li Wang1、*, Zi-Yu Chen1, and He-Ming Chen2
Author Affiliations
  • 1College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
  • 2Bell Honors School, Nanjing University of Posts and Telecommunications, Nanjing 210023, China
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    Figures & Tables(12)
    (a) Schematic configuration of the sandwiched structure; field distributions for the (b) quasi-TE and (c) quasi-TM fundamental mode in a sandwiched waveguide ().
    Schematic configuration of the demultiplexer structure: (a) Top view; (b) cross section of the MMI waveguide.
    Beat length as a function of n (SiNx) when the MMI width WMMI is: (a) 3 µm; (b) 4 µm; (c) 5 µm.
    n(SiNx) as functions of WMMI when the demultiplexer is polarization-insensitive.
    (a) and (b) M as functions of WMMI when the demultiplexer is polarization-insensitive.
    R as functions of WMMI.
    Field distributions of the MMI demultiplexer: (a) Quasi-TE mode, at 1310 nm; (b) quasi-TM mode, at 1310 nm; (c) quasi-TE mode, at 1550 nm; (d) quasi-TM mode, at 1550 nm.
    Output powers (normalized to the input power) from Port2 and Port3 as the wavelength varies: (a) 1310 nm band; (b) 1550 nm band.
    Performance parameters as functions of LMMI: (a) IL; (b) CT.
    Performance of parameters as functions of h(SiNx): (a) IL; (b) CT.
    • Table 1.

      Performances of the MMI demultiplexer.

      MMI型解复用器的性能参数

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      Table 1.

      Performances of the MMI demultiplexer.

      MMI型解复用器的性能参数

      性能参数IL/dBCT/dB
      1310 nm, TE0.25–21.32
      1310 nm, TM0.18–24.40
      1550 nm, TE0.65–20.97
      1550 nm, TM0.38–25.70
    • Table 2.

      Performances of the MMI demultiplexer when input and output waveguides are straight.

      输入、输出波导均为直波导时的MMI型解复用器的性能参数

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      Table 2.

      Performances of the MMI demultiplexer when input and output waveguides are straight.

      输入、输出波导均为直波导时的MMI型解复用器的性能参数

      性能参数IL/dBCT/dB
      1310 nm, TE0.500–17.73
      1310 nm, TM0.173–23.80
      1550 nm, TE1.380–14.21
      1550 nm, TM0.460–22.54
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    Jing-Li Wang, Zi-Yu Chen, He-Ming Chen. Design of polarization-insensitive 1 × 2 multimode interference demultiplexer based on Si3N4/SiNx/Si3N4 sandwiched structure [J]. Acta Physica Sinica, 2020, 69(5): 054206-1

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    Paper Information

    Category:

    Received: Sep. 23, 2019

    Accepted: --

    Published Online: Nov. 18, 2020

    The Author Email:

    DOI:10.7498/aps.69.20191449

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