Semiconductor Optoelectronics, Volume. 43, Issue 2, 303(2022)
Investigation on Bulk Acoustic Wave Resonant Solar Blind Ultraviolet Sensor
[1] [1] Razeghi M. Short-wavelength solar-blind detectors-status, prospects, and markets[J]. Proc. of the IEEE, 2002, 90(6): 1006-1014.
[5] [5] Fei C, Liu X, Zhu B, et al. AlN piezoelectric thin films for energy harvesting and acoustic devices[J]. Nano Energy, 2018, 51: 146-161.
[6] [6] Yun X F, Lin W K, Hu R, et al. Biaxial film bulk acoustic resonator magnetic sensor based on the Fe80Ga20 anisotropic ΔE effect[J]. J. of Phys. D: Appl. Phys., 2021, 55(13): 135002.
[7] [7] Yun X F, Lin W K, Wang X Y, et al. Dual-mode temperature and magnetic sensor based on FBAR[C]// Proc. of IEEE 2020 15th Symp. on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA), 2021: 248-252.
[8] [8] Yun X F, Lin W K, Wang X Y, et al. FBAR magnetic sensor composed of CMOS compatible materials[C]// Proc.of IEEE 2021 5th Electron Devices Technol. & Manufacturing Conf. (EDTM), 2021: 1-3.
[9] [9] Lin W K, Yun X F, Wang X Y, et al. Super-high sensitivity FBAR temperature sensor based on size effect of Ti insertion layer[J]. Materials Research Express, 2021, 8(9): 095701.
[10] [10] Qiu X, Zhu J, Oiler J, et al. Film bulk acoustic-wave resonator based ultraviolet sensor[J]. Appl. Phys. Lett., 2009, 94(15): 151917.
[11] [11] Wang Z, Qiu X, Chen S J, et al. ZnO based film bulk acoustic resonator as infrared sensor[J]. Thin Solid Films, 2011, 519(18): 6144-6147.
[12] [12] Zhou C J, Yang Y, Shu Y, et al. Visible-light photoresponse of AlN-based film bulk acoustic wave resonator[J]. Appl. Phys. Lett., 2013, 102(19): 191914.
[14] [14] Hsu Y H, Wu W Y, Lin K L, et al.ε-Ga2O3 grown on c-plane sapphire by MOCVD with a multistep growth process[J]. Crystal Growth & Design, 2022, 22(3): 1837-1845.
[15] [15] Chen T W, Zhang X D, Ma Y J, et al. Self-powered and spectrally distinctive nanoporous Ga2O3/GaN epitaxial heterojunction UV photodetectors[J]. Adv. Photonics Research, 2021, 2(8): 2100049.
[17] [17] Larson J D, Bradley P D, Wartenberg S, et al. Modified Butterworth-Van Dyke circuit for FBAR resonators and automated measurement system[C]// 2000 IEEE Ultrasonics Symposium, 2000: 863-868.
[18] [18] Lanz R, Muralt P. Bandpass filters for 8GHz using solidly mounted bulk acoustic wave resonators[C]// IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, 2005: 938-948.
[20] [20] Zhou J, Liu Y, Xu Q W, et al. ScAlN/AlN film-based Lamé mode resonator with high effective electromechanical coupling coefficient[J]. J. of Microelectromechanical Systems, 2021, 30(5): 677-679.
[21] [21] Uzunov I S, Terzieva M D, Nikolova B M, et al. Extraction of modified Butterworth-Van Dyke model of FBAR based on FEM analysis[C]// Proc. of 2017 ⅩⅩⅥ Inter. Scientific Conf. Electronics (ET), 2017: 1-4.
[22] [22] Ashraf N, Mesbah Y, Emad A, et al. Enabling the 5G modelling and design of high Q film bulk acoustic wave resonator(FBAR) for high frequency applications[C]// Proc. of 2020 IEEE Inter. Symp. on Circuits and Systems(ISCAS), 2020: 1-4.
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WANG Xiaoyi, LIN Wenkui, LI Haiou, YUN Xiaofan, ZENG Chunhong, CHEN Tiwei, LIU Yizhang, SUN Yuhua, CUI Qi, ZHANG Baoshun. Investigation on Bulk Acoustic Wave Resonant Solar Blind Ultraviolet Sensor[J]. Semiconductor Optoelectronics, 2022, 43(2): 303
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Received: Mar. 26, 2022
Accepted: --
Published Online: Jul. 21, 2022
The Author Email: Wenkui LIN (wklin2007@sinano.ac.cn)