[1] Pisani M, Giugni A. A portable picometer reference actuator with 100 µm range, picometer resolution, subnanometer accuracy and submicroradian tip-tilt error for the characterization of measuring instruments at the nanoscale[J]. Metrologia, 55, 541-557(2018).

[2] Lawall J, Kessler E. Michelson interferometry with 10 pm accuracy[J]. Review of Scientific Instruments, 71, 2669-2676(2000).

[3] Joo K N, Clark E, Zhang Y Q et al. A compact high-precision periodic-error-free heterodyne interferometer[J]. Journal of the Optical Society of America A, 37, B11-B18(2020).

[4] Weichert C, Köchert P, Köning R et al. A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm[J]. Measurement Science and Technology, 23, 094005(2012).

[5] Guan J, Köchert P, Weichert C et al. A differential interferometric heterodyne encoder with 30 picometer periodic nonlinearity and sub-nanometer stability[J]. Precision Engineering, 50, 114-118(2017).

[6] Hori Y, Gonda S, Bitou Y et al. Periodic error evaluation system for linear encoders using a homodyne laser interferometer with 10 picometer uncertainty[J]. Precision Engineering, 51, 388-392(2018).

[7] Xiang X S, Li M K, Wei C L et al. Precision fringe period metrology using an LSQ sine fit algorithm[J]. Applied Optics, 57, 4777-4784(2018).

[8] Xiang X S, Jia W, Xiang C C et al. Long-range in situ picometer measurement of the period of an interference field[J]. Applied Optics, 58, 2929-2935(2019).

[9] Li C, Zhou C H, Lu Y K et al. Picometer-differential twice-exposed element for three-dimensional measurement with extremely long depth of field[J]. Applied Optics, 59, 5234-5239(2020).

[10] Ye J, Zhou C H, Yu J J et al. Two-dimensional picometer comb for three-dimensional reconstruction[J]. Applied Optics, 59, 10547-10553(2020).

[11] Zhou C. From holography to picooptics[J]. Proceedings of SPIE, 11188, 111880N(2019).

[12] Zhou C H. From picometer comb to picooptics[C], FTh2A.1(2020).

[13] Chen C G. Beam alignment and image metrology for scanning beam interference lithography: fabricating gratings with nanometer phase accuracy[D](2005).

[14] Li M K, Xiang X S, Zhou C H et al. Scan angle error measurement based on phase-stepping algorithms in scanning beam interference lithography[J]. Applied Optics, 58, 2641-2649(2019).

[15] Li M K, Xiang X S, Zhou C H et al. Two-dimensional grating fabrication based on ultra-precision laser direct writing system[J]. Acta Optica Sinica, 39, 0905001(2019).

[16] Xie Y F, Jia W, Zhao D et al. Traceable and long-range grating pitch measurement with picometer resolution[J]. Optics Communications, 476, 126316(2020).

[17] Zhou C H. Picometer comb, manufacturing device and manufacturing method of Picometer comb[P].