Optics and Precision Engineering, Volume. 10, Issue 6, 634(2002)

Explanation of the round interference fringes in the measurement of varied-line-space gratings

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    References(6)

    [1] [1] Namioka T, Koike M. Aspheric wave-front recording optics for holographic gratings[J]. Appl. Opt, 1995, 34:2180-2186.

    [3] [3] Hettrick M C, Bowyer S. Varied line-space gratings: new designs for use in grazing incidence spectrometers [J]. Appl. Opt. 1983, 22:3921-3924.

    [5] [5] Cocco D, Sergo R, Sostero G, et al. High precision measurements of the groove density of diffraction gratings[A]. San Diego: Conference on Soft X-Ray and EUV Imaging Systems[C]. 2000.

    [6] [6] Chen S J, Chen C T, Perng S Y, et al. Design and fabrication of an active polynomial grating for soft-X-ray monochromators and spectrometers[A]. Berlin 7th International Conference on Synchrotron Radiation Instrumentation[C]. 2000.

    [8] [8] Deville B, Bonnemason F. Holographically recorded, ion etched variable line space gratings[J]. SPIE, 1998. 3450:24-35.

    [9] [9] Palmer C. Theory of second-generation holographic diffraction gratings[J]. J.Opt.Soc.Am.A, 1989,6(8):1175-1188.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Explanation of the round interference fringes in the measurement of varied-line-space gratings[J]. Optics and Precision Engineering, 2002, 10(6): 634

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    Paper Information

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    Received: Apr. 21, 2002

    Accepted: --

    Published Online: Sep. 18, 2007

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