Optics and Precision Engineering, Volume. 10, Issue 6, 634(2002)
Explanation of the round interference fringes in the measurement of varied-line-space gratings
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Explanation of the round interference fringes in the measurement of varied-line-space gratings[J]. Optics and Precision Engineering, 2002, 10(6): 634