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Optics and Precision Engineering, Volume. 10, Issue 6, 634(2002)

Explanation of the round interference fringes in the measurement of varied-line-space gratings

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Explanation of the round interference fringes in the measurement of varied-line-space gratings[J]. Optics and Precision Engineering, 2002, 10(6): 634

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    Received: Apr. 21, 2002

    Accepted: --

    Published Online: Sep. 18, 2007

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology