Optics and Precision Engineering, Volume. 22, Issue 11, 3067(2014)
Sensorless control of sliding mode observer for multi-DOF submicron-order planar motion stage
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DIAN Song-yi, XIANG Guo-fei, PU Ming. Sensorless control of sliding mode observer for multi-DOF submicron-order planar motion stage[J]. Optics and Precision Engineering, 2014, 22(11): 3067
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Received: Dec. 27, 2013
Accepted: --
Published Online: Dec. 8, 2014
The Author Email: Song-yi DIAN (scudiansy@scu.edu.cn)
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