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Optics and Precision Engineering, Volume. 12, Issue z1, 1(2004)

Design on micromachined gyroscope with electromagnetic levitating rotor

[in Chinese]1... [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]1 and [in Chinese]1 |Show fewer author(s)
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    [2] [2] YAZDI N,AYAZI F,NAJAFI K. Micromachined inertial sensors[J]. IEEE 1998,86(8): 1640-1659.

    [4] [4] SHEARWOOD C,WILLIAMS C B,MELLOR P H,et al. Levitation of a micromachined rotor for application in a rotating gyroscope[J]. Electron. Lett, 1995,31(21): 1845-1846. (in Chinese)

    [5] [5] SHEARWOOD C, HO K Y,WILLIAMS C B,et al. Development of a levitated micromotor for application as a gyroscope[J]. Sensors and Actuators,2000,83:85-92.

    [6] [6] WILLIAMS C B,SHEARWOOD C,MELLOR P H,et al. Modelling and testing of a frictionless levitated micromotor[J]. Sens. Actuators, 1997, A 61:469-473.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design on micromachined gyroscope with electromagnetic levitating rotor[J]. Optics and Precision Engineering, 2004, 12(z1): 1

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    Paper Information

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    Received: Feb. 22, 2004

    Accepted: --

    Published Online: Nov. 3, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology