Acta Photonica Sinica, Volume. 40, Issue 6, 852(2011)

Optical Properties of N-doped β-Ga2O3 Films Deposited by RF Magnetron Sputtering

YAN Jin-liang*, ZHANG Yi-jun, LI Qing-shan, QU Chong, ZHANG li-ying, and LI Ting
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    YAN Jin-liang, ZHANG Yi-jun, LI Qing-shan, QU Chong, ZHANG li-ying, LI Ting. Optical Properties of N-doped β-Ga2O3 Films Deposited by RF Magnetron Sputtering[J]. Acta Photonica Sinica, 2011, 40(6): 852

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    Paper Information

    Received: Dec. 27, 2010

    Accepted: --

    Published Online: Jun. 24, 2011

    The Author Email: Jin-liang YAN (yanjinliang@yahoo.cn)

    DOI:10.3788/gzxb20114006.0852

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